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Statements

Subject Item
n2:RIV%2F68407700%3A21230%2F06%3A00120432%21RIV10-MSM-21230___
rdf:type
skos:Concept n20:Vysledek
dcterms:description
PtSi, Al and Cu contacts were optimized on minimal contact resistance using ion milling. PtSi, Al and Cu contacts were optimized on minimal contact resistance using ion milling.
dcterms:title
The Effect of Ion Milling on the Parameters of Copper Contacts The Effect of Ion Milling on the Parameters of Copper Contacts
skos:prefLabel
The Effect of Ion Milling on the Parameters of Copper Contacts The Effect of Ion Milling on the Parameters of Copper Contacts
skos:notation
RIV/68407700:21230/06:00120432!RIV10-MSM-21230___
n3:aktivita
n19:Z
n3:aktivity
Z(MSM6840770017)
n3:dodaniDat
n5:2010
n3:domaciTvurceVysledku
n15:8796343 n15:7091397
n3:druhVysledku
n13:D
n3:duvernostUdaju
n17:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
473099
n3:idVysledku
RIV/68407700:21230/06:00120432
n3:jazykVysledku
n8:eng
n3:klicovaSlova
aluminum; contact; copper; diode; ion milling; platinum silicide; silicon
n3:klicoveSlovo
n10:platinum%20silicide n10:copper n10:contact n10:ion%20milling n10:aluminum n10:silicon n10:diode
n3:kontrolniKodProRIV
[02B2D6D35460]
n3:mistoKonaniAkce
Praha
n3:mistoVydani
Praha
n3:nazevZdroje
ISPS 06 Proceedings
n3:obor
n11:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
3
n3:rokUplatneniVysledku
n5:2006
n3:tvurceVysledku
Kolesnikov, Dmytro Vobecký, Jan
n3:typAkce
n7:EUR
n3:zahajeniAkce
2006-08-29+02:00
n3:zamer
n12:MSM6840770017
s:issn
1751-858X
s:numberOfPages
5
n21:hasPublisher
České vysoké učení technické v Praze. Ediční středisko
n6:isbn
80-01-03524-7
n14:organizacniJednotka
21230