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Statements

Subject Item
n2:RIV%2F68407700%3A21220%2F01%3A02068567%21RIV%2F2002%2FMSM%2F212202%2FN
rdf:type
skos:Concept n16:Vysledek
dcterms:description
The influence of deposition of temperature (20-500°C) on properties of DLC layers (thickness 5800-600nm) were investigated. We used Raman and IR spectroscopy to analyse layer properties. The layer structure was amorphous. The layers were polymeric at ambient temperature, near 300°C their structure was destructed as result of polymer decomposition. The influence of deposition of temperature (20-500°C) on properties of DLC layers (thickness 5800-600nm) were investigated. We used Raman and IR spectroscopy to analyse layer properties. The layer structure was amorphous. The layers were polymeric at ambient temperature, near 300°C their structure was destructed as result of polymer decomposition.
dcterms:title
Properties of DLC Layers Prepared Using PACVD Method at Various Temperatures Properties of DLC Layers Prepared Using PACVD Method at Various Temperatures
skos:prefLabel
Properties of DLC Layers Prepared Using PACVD Method at Various Temperatures Properties of DLC Layers Prepared Using PACVD Method at Various Temperatures
skos:notation
RIV/68407700:21220/01:02068567!RIV/2002/MSM/212202/N
n3:strany
82;83
n3:aktivita
n10:P
n3:aktivity
P(OC 522.11)
n3:dodaniDat
n9:2002
n3:domaciTvurceVysledku
n7:7910061
n3:druhVysledku
n4:D
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
693386
n3:idVysledku
RIV/68407700:21220/01:02068567
n3:jazykVysledku
n19:eng
n3:klicovaSlova
DLC; Layer Structure; PACVD
n3:klicoveSlovo
n6:PACVD n6:DLC n6:Layer%20Structure
n3:kontrolniKodProRIV
[48C496AC4E47]
n3:mistoKonaniAkce
Poznaň
n3:mistoVydani
Poznaň
n3:nazevZdroje
Crystal Research and Technology
n3:obor
n13:JK
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
5
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:projekt
n18:OC%20522.11
n3:rokUplatneniVysledku
n9:2001
n3:tvurceVysledku
Gurovič, Ján
n3:typAkce
n17:WRD
n3:zahajeniAkce
2001-05-20+02:00
s:numberOfPages
2
n8:hasPublisher
University of Technology
n15:organizacniJednotka
21220