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Statements

Subject Item
n2:RIV%2F68407700%3A21110%2F10%3A00190393%21RIV12-GA0-21110___
rdf:type
n7:Vysledek skos:Concept
rdfs:seeAlso
http://elsevier.com/locate/procedia
dcterms:description
The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 um) Silicon On Insulator substrates with heavily doped handle layers (= 0.005 cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 um) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometric submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of 10 Hz/uε. The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 um) Silicon On Insulator substrates with heavily doped handle layers (= 0.005 cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 um) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometric submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of 10 Hz/uε.
dcterms:title
Strain sensing on steel surfaces using vacuum packaged MEMS resonators Strain sensing on steel surfaces using vacuum packaged MEMS resonators
skos:prefLabel
Strain sensing on steel surfaces using vacuum packaged MEMS resonators Strain sensing on steel surfaces using vacuum packaged MEMS resonators
skos:notation
RIV/68407700:21110/10:00190393!RIV12-GA0-21110___
n3:aktivita
n17:P
n3:aktivity
P(GA103/09/1600)
n3:cisloPeriodika
5
n3:dodaniDat
n9:2012
n3:domaciTvurceVysledku
n4:9097791
n3:druhVysledku
n13:J
n3:duvernostUdaju
n10:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
290203
n3:idVysledku
RIV/68407700:21110/10:00190393
n3:jazykVysledku
n19:eng
n3:klicovaSlova
strain sensing; steel; MEMS resonators; vacuum packaging; monitoring
n3:klicoveSlovo
n5:MEMS%20resonators n5:vacuum%20packaging n5:strain%20sensing n5:steel n5:monitoring
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[F2F0BFBB78A8]
n3:nazevZdroje
Procedia Engineering
n3:obor
n16:JM
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
8
n3:projekt
n15:GA103%2F09%2F1600
n3:rokUplatneniVysledku
n9:2010
n3:svazekPeriodika
5
n3:tvurceVysledku
Soga, K. Belsito, L. Roncaglia, A. Seshia, A. A. Záleský, Jan Mancarella, F. Ferri, M. Yan, J.
n3:wos
000287162400351
s:issn
1877-7058
s:numberOfPages
4
n20:doi
10.1016/j.proeng.2010.09.383
n12:organizacniJednotka
21110