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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F99%3A02000092%21RIV%2F2003%2FAV0%2FA02003%2FN
rdf:type
skos:Concept n16:Vysledek
dcterms:description
Plasma properties related to TiN deposition are compared in two triode ion-plating systems using a low-voltage arc discharge. Plasma properties related to TiN deposition are compared in two triode ion-plating systems using a low-voltage arc discharge.
dcterms:title
Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties. Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties.
skos:prefLabel
Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties. Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties.
skos:notation
RIV/68378271:_____/99:02000092!RIV/2003/AV0/A02003/N
n3:strany
1211;1218
n3:aktivita
n12:Z n12:P
n3:aktivity
P(GV106/96/K245), P(KSK1043601), Z(AV0Z1010914)
n3:cisloPeriodika
N/A
n3:dodaniDat
n6:2003
n3:domaciTvurceVysledku
n8:7943016
n3:druhVysledku
n14:J
n3:duvernostUdaju
n10:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
749596
n3:idVysledku
RIV/68378271:_____/99:02000092
n3:jazykVysledku
n18:eng
n3:klicovaSlova
N/A
n3:klicoveSlovo
n5:N%2FA
n3:kodStatuVydavatele
CH - Švýcarská konfederace
n3:kontrolniKodProRIV
[E57B9547CD88]
n3:nazevZdroje
Surface and Coatings Technology
n3:obor
n15:BM
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
8
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:projekt
n13:GV106%2F96%2FK245 n13:KSK1043601
n3:rokUplatneniVysledku
n6:1999
n3:svazekPeriodika
116-119
n3:tvurceVysledku
Stals, L. M. Maček, M. Kadlec, Stanislav Quaeyhaegens, C. Navinšek, B. Panjan, P. Wouters, S. Meert, B.
n3:zamer
n11:AV0Z1010914
s:issn
0257-8972
s:numberOfPages
8