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Statements

Subject Item

n2:RIV%2F68378271%3A_____%2F97%3A02980342%21RIV%2F2001%2FAV0%2FA02001%2FN

rdf:type

n11:Vysledek skos:Concept

dcterms:description

Annotation not available Annotation not available

dcterms:title

Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma. Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma.

skos:prefLabel

Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma. Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma.

skos:notation

RIV/68378271:_____/97:02980342!RIV/2001/AV0/A02001/N

n5:strany

1999

n5:aktivita

n15:P

n5:aktivity

P(GV106/96/K245)

n5:cisloPeriodika

4

n5:dodaniDat

n12:2001

n5:domaciTvurceVysledku

Musil, Jindřich Mišina, Martin

n5:druhVysledku

n6:J

n5:duvernostUdaju

n13:S

n5:entitaPredkladatele

n10:predkladatel

n5:idSjednocenehoVysledku

808318

n5:idVysledku

RIV/68378271:_____/97:02980342

n5:jazykVysledku

n7:eng

n5:kodStatuVydavatele

US - Spojené státy americké

n5:kontrolniKodProRIV

[01492068EE90]

n5:nazevZdroje

Journal of Vacuum Science and Technology. A

n5:obor

n14:BE

n5:pocetDomacichTvurcuVysledku

2

n5:pocetTvurcuVysledku

3

n5:projekt

n8:GV106%2F96%2FK245

n5:rokUplatneniVysledku

n12:1997

n5:svazekPeriodika

15

n5:tvurceVysledku

Mišina, Martin Hovorka, D. Musil, Jindřich

s:issn

0734-2101

s:numberOfPages

8