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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n14http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68378271%3A_____%2F14%3A00439381%21RIV15-AV0-68378271/
n13http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n11http://linked.opendata.cz/resource/domain/vavai/projekt/
n8http://linked.opendata.cz/ontology/domain/vavai/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n4http://linked.opendata.cz/ontology/domain/vavai/riv/
n16http://bibframe.org/vocab/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n9http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n12http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n10http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n18http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n5http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F14%3A00439381%21RIV15-AV0-68378271
rdf:type
n8:Vysledek skos:Concept
dcterms:description
The metal ionized flux fraction and production of double charged metal ions Me2þ of different materials (Al, Cu, Fe, Ti) by High Power Impulse Magnetron Sputtering (HiPIMS) operated with and without a pre-ionization assistance is compared in the paper. The Electron Cyclotron Wave Resonance (ECWR) discharge was employed as the pre-ionization agent providing a seed of charge in the idle time of HiPIMS pulses. A modified grid-free biased quartz crystal microbalance was used to estimate the metal ionized flux fraction n. The energy-resolved mass spectrometry served as a complementary method to distinguish particular ion contributions to the total ionized flux onto the substrate. The ratio between densities of doubly Me2þ and singly Meþ charged metal ions was determined. It is shown that ECWR assistance enhances Me2þ production with respect of absorbed rf-power. The metal ionized flux fraction and production of double charged metal ions Me2þ of different materials (Al, Cu, Fe, Ti) by High Power Impulse Magnetron Sputtering (HiPIMS) operated with and without a pre-ionization assistance is compared in the paper. The Electron Cyclotron Wave Resonance (ECWR) discharge was employed as the pre-ionization agent providing a seed of charge in the idle time of HiPIMS pulses. A modified grid-free biased quartz crystal microbalance was used to estimate the metal ionized flux fraction n. The energy-resolved mass spectrometry served as a complementary method to distinguish particular ion contributions to the total ionized flux onto the substrate. The ratio between densities of doubly Me2þ and singly Meþ charged metal ions was determined. It is shown that ECWR assistance enhances Me2þ production with respect of absorbed rf-power.
dcterms:title
Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges
skos:prefLabel
Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges
skos:notation
RIV/68378271:_____/14:00439381!RIV15-AV0-68378271
n4:aktivita
n10:P n10:I
n4:aktivity
I, P(LH12043)
n4:cisloPeriodika
15
n4:dodaniDat
n5:2015
n4:domaciTvurceVysledku
n13:2296268 n13:9254927
n4:druhVysledku
n7:J
n4:duvernostUdaju
n17:S
n4:entitaPredkladatele
n14:predkladatel
n4:idSjednocenehoVysledku
22736
n4:idVysledku
RIV/68378271:_____/14:00439381
n4:jazykVysledku
n12:eng
n4:klicovaSlova
electron-impact ionization; physical vapor-deposition; cross-sections; plasma parameters; rate coefficients; low-pressure; energy; atoms; films; ions
n4:klicoveSlovo
n9:cross-sections n9:atoms n9:films n9:ions n9:electron-impact%20ionization n9:plasma%20parameters n9:energy n9:physical%20vapor-deposition n9:low-pressure n9:rate%20coefficients
n4:kodStatuVydavatele
US - Spojené státy americké
n4:kontrolniKodProRIV
[FC00739BF386]
n4:nazevZdroje
Journal of Applied Physics
n4:obor
n18:BL
n4:pocetDomacichTvurcuVysledku
2
n4:pocetTvurcuVysledku
6
n4:projekt
n11:LH12043
n4:rokUplatneniVysledku
n5:2014
n4:svazekPeriodika
115
n4:tvurceVysledku
Hubička, Zdeněk Tichý, M. Straňák, V. Čada, Martin Drache, S. Hippler, R.
n4:wos
000335227100006
s:issn
0021-8979
s:numberOfPages
7
n16:doi
10.1063/1.4871635