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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F13%3A00424372%21RIV14-GA0-68378271
rdf:type
skos:Concept n18:Vysledek
dcterms:description
This article deals with growth of diamond thin films on GaN substrates. First, Diamond-on-GaN structures are pointed out as a promising electronic material with variety of applications. From the practical point of view, diamond thin films are shown as an attractive solution to the limited use of monocrystalline diamond substrates. For this purpose, some technological requirements on the diamond thin film growth on GaN substrates are stressed too; i.e. the topics as thermally - induced stresses, aggressive process conditions or growth of diamond films, demand on the low temperature diamond deposit ion, selective area deposition, spontaneous nucleation of diamond, diffusion of carbon atoms, etc. The experimental part of our study focuses on the direct growth of polycrystalline diamond films on AlGaN/GaN high electron mobility transistors (HEMTs) related to aforementioned technological challenges. This article deals with growth of diamond thin films on GaN substrates. First, Diamond-on-GaN structures are pointed out as a promising electronic material with variety of applications. From the practical point of view, diamond thin films are shown as an attractive solution to the limited use of monocrystalline diamond substrates. For this purpose, some technological requirements on the diamond thin film growth on GaN substrates are stressed too; i.e. the topics as thermally - induced stresses, aggressive process conditions or growth of diamond films, demand on the low temperature diamond deposit ion, selective area deposition, spontaneous nucleation of diamond, diffusion of carbon atoms, etc. The experimental part of our study focuses on the direct growth of polycrystalline diamond films on AlGaN/GaN high electron mobility transistors (HEMTs) related to aforementioned technological challenges.
dcterms:title
Perspectives and challenges in %22Diamond-on-GaN%22 technology Perspectives and challenges in %22Diamond-on-GaN%22 technology
skos:prefLabel
Perspectives and challenges in %22Diamond-on-GaN%22 technology Perspectives and challenges in %22Diamond-on-GaN%22 technology
skos:notation
RIV/68378271:_____/13:00424372!RIV14-GA0-68378271
n18:predkladatel
n19:ico%3A68378271
n5:aktivita
n11:P n11:I
n5:aktivity
I, P(FR-TI2/736), P(GBP108/12/G108)
n5:dodaniDat
n9:2014
n5:domaciTvurceVysledku
n10:6031285 Babchenko, Oleg n10:7465416 Ižák, Tibor n10:2668157
n5:druhVysledku
n17:D
n5:duvernostUdaju
n8:S
n5:entitaPredkladatele
n14:predkladatel
n5:idSjednocenehoVysledku
95890
n5:idVysledku
RIV/68378271:_____/13:00424372
n5:jazykVysledku
n16:eng
n5:klicovaSlova
diamond films; HEMT transistors; GaN; high power devices
n5:klicoveSlovo
n7:diamond%20films n7:GaN n7:high%20power%20devices n7:HEMT%20transistors
n5:kontrolniKodProRIV
[8E6BA5777418]
n5:mistoKonaniAkce
Štrbské Pleso
n5:mistoVydani
Bratislava
n5:nazevZdroje
Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies)
n5:obor
n12:BM
n5:pocetDomacichTvurcuVysledku
5
n5:pocetTvurcuVysledku
6
n5:projekt
n15:GBP108%2F12%2FG108 n15:FR-TI2%2F736
n5:rokUplatneniVysledku
n9:2013
n5:tvurceVysledku
Jirásek, Vít Babchenko, Oleg Ižák, Tibor Kromka, Alexander Varga, Marián Vanko, G.
n5:typAkce
n20:EUR
n5:zahajeniAkce
2013-10-10+02:00
s:numberOfPages
5
n21:hasPublisher
Slovenská vákuová spoločnosť
n4:isbn
978-80-971179-2-4