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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F12%3A00399675%21RIV14-GA0-68378271
rdf:type
skos:Concept n11:Vysledek
dcterms:description
Diamond thin films were deposited in the linear antenna microwave plasma system. The micro- or nano-sized character of grown crystals was controlled by total gas pressure and CO2 content in the hydrogen rich gas mixture. Both these process parameters were shown as principal factors shifting the diamond growth either into re-nucleation or to crystal-enlargement mode. Thus the detailed study on total gas pressure influence onto growth kinetics and gas chemistry is presented. Diamond thin films were deposited in the linear antenna microwave plasma system. The micro- or nano-sized character of grown crystals was controlled by total gas pressure and CO2 content in the hydrogen rich gas mixture. Both these process parameters were shown as principal factors shifting the diamond growth either into re-nucleation or to crystal-enlargement mode. Thus the detailed study on total gas pressure influence onto growth kinetics and gas chemistry is presented.
dcterms:title
Large area growth of functional and electronic-grade diamond thin films - today's reality Large area growth of functional and electronic-grade diamond thin films - today's reality
skos:prefLabel
Large area growth of functional and electronic-grade diamond thin films - today's reality Large area growth of functional and electronic-grade diamond thin films - today's reality
skos:notation
RIV/68378271:_____/12:00399675!RIV14-GA0-68378271
n11:predkladatel
n12:ico%3A68378271
n3:aktivita
n7:I n7:P
n3:aktivity
I, P(GAP108/11/0794), P(GAP108/12/0910)
n3:dodaniDat
n13:2014
n3:domaciTvurceVysledku
Ižák, Tibor Babchenko, Oleg n9:7465416 n9:6812872 n9:9994602 n9:6031285
n3:druhVysledku
n14:D
n3:duvernostUdaju
n21:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
146443
n3:idVysledku
RIV/68378271:_____/12:00399675
n3:jazykVysledku
n16:eng
n3:klicovaSlova
diamond thin films; large area deposition; linear plasma; pressure
n3:klicoveSlovo
n18:large%20area%20deposition n18:pressure n18:linear%20plasma n18:diamond%20thin%20films
n3:kontrolniKodProRIV
[167E1397896B]
n3:mistoKonaniAkce
Štrbské pleso
n3:mistoVydani
Bratislava
n3:nazevZdroje
Progresívne materiály a vákuum ( Progressive materials and vacuum)
n3:obor
n20:BM
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
6
n3:projekt
n5:GAP108%2F11%2F0794 n5:GAP108%2F12%2F0910
n3:rokUplatneniVysledku
n13:2012
n3:tvurceVysledku
Varga, Marián Ižák, Tibor Babchenko, Oleg Kromka, Alexander Potocký, Štěpán Rezek, Bohuslav
n3:typAkce
n17:EUR
n3:zahajeniAkce
2012-11-08+01:00
s:numberOfPages
4
n8:hasPublisher
Slovenská vakuová spolocnosť
n4:isbn
978-80-971179-0-0