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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F12%3A00390533%21RIV13-GA0-68378271
rdf:type
n6:Vysledek skos:Concept
dcterms:description
Silver thin films exhibit unusual properties and performances due to unique electrical and optical properties of silver. The films attract attention in eg. photonics, electronics, sensors and biophysics. Particular application requires the film of special morphology, ie. isolated nanoparticles, arrays, or smooth surface. It is important to choose proper deposition technique and understand mechanism of silver nucleation and growth to better control the film properties. Hence, we investigate and compare the growth of ultrathin silver film by pulsed laser deposition (PLD) and magnetron sputtering techniques. A silver target was ablated by a Nd:YAG laser operating at wavelength of 266 nm and pulse length of 4 ns in case of PLD. Silver RF magnetron sputtering was performed at power varied from 30 to 100 W. Both experiments were carried out in argon atmosphere of pressure varied from 0.5 to 3 Pa. We focus on in-situ monitoring of electrical and optical properties of the growing layer. Silver thin films exhibit unusual properties and performances due to unique electrical and optical properties of silver. The films attract attention in eg. photonics, electronics, sensors and biophysics. Particular application requires the film of special morphology, ie. isolated nanoparticles, arrays, or smooth surface. It is important to choose proper deposition technique and understand mechanism of silver nucleation and growth to better control the film properties. Hence, we investigate and compare the growth of ultrathin silver film by pulsed laser deposition (PLD) and magnetron sputtering techniques. A silver target was ablated by a Nd:YAG laser operating at wavelength of 266 nm and pulse length of 4 ns in case of PLD. Silver RF magnetron sputtering was performed at power varied from 30 to 100 W. Both experiments were carried out in argon atmosphere of pressure varied from 0.5 to 3 Pa. We focus on in-situ monitoring of electrical and optical properties of the growing layer.
dcterms:title
Comparison of the growth of ultrathin silver film by pulsed laser deposition and magnetron sputtering Comparison of the growth of ultrathin silver film by pulsed laser deposition and magnetron sputtering
skos:prefLabel
Comparison of the growth of ultrathin silver film by pulsed laser deposition and magnetron sputtering Comparison of the growth of ultrathin silver film by pulsed laser deposition and magnetron sputtering
skos:notation
RIV/68378271:_____/12:00390533!RIV13-GA0-68378271
n6:predkladatel
n14:ico%3A68378271
n3:aktivita
n13:Z n13:P
n3:aktivity
P(GAP108/11/0958), P(MEB091125), Z(AV0Z10100522)
n3:dodaniDat
n11:2013
n3:domaciTvurceVysledku
n4:9315918 n4:7433514 n4:9640495 n4:7772629 n4:8638519
n3:druhVysledku
n18:O
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
128059
n3:idVysledku
RIV/68378271:_____/12:00390533
n3:jazykVysledku
n9:eng
n3:klicovaSlova
pulsed laser deposition; ultrathin silver film; magnetron sputtering; in-situ monitoring
n3:klicoveSlovo
n10:magnetron%20sputtering n10:ultrathin%20silver%20film n10:in-situ%20monitoring n10:pulsed%20laser%20deposition
n3:kontrolniKodProRIV
[787D785EB89C]
n3:obor
n16:BH
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
7
n3:projekt
n5:GAP108%2F11%2F0958 n5:MEB091125
n3:rokUplatneniVysledku
n11:2012
n3:tvurceVysledku
Piksová, K. Fekete, Ladislav Čekada, M. Bulíř, Jiří Fitl, Přemysl Novotný, Michal Lančok, Ján
n3:zamer
n12:AV0Z10100522