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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F12%3A00390080%21RIV13-GA0-68378271
rdf:type
n10:Vysledek skos:Concept
dcterms:description
We study etching effects of low temperature hydrogen plasma treatment (200–300 $C) in two different microwave plasma reactors (linear and focused plasma) on diamond solutiongated field-effect transistors with various polymers for encapsulation (MA-P, OFPR, SU8). Three-dimensional transistor microstructures (20 μm) are grown from nanocrystalline H-terminated intrinsic diamond byMW-CVD on Si/SiO2 substrates. We study etching effects of low temperature hydrogen plasma treatment (200–300 $C) in two different microwave plasma reactors (linear and focused plasma) on diamond solutiongated field-effect transistors with various polymers for encapsulation (MA-P, OFPR, SU8). Three-dimensional transistor microstructures (20 μm) are grown from nanocrystalline H-terminated intrinsic diamond byMW-CVD on Si/SiO2 substrates.
dcterms:title
Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors
skos:prefLabel
Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors
skos:notation
RIV/68378271:_____/12:00390080!RIV13-GA0-68378271
n10:predkladatel
n17:ico%3A68378271
n3:aktivita
n15:Z n15:P
n3:aktivity
P(GAP108/12/0996), P(GBP108/12/G108), P(GD202/09/H041), Z(AV0Z10100521)
n3:cisloPeriodika
2
n3:dodaniDat
n14:2013
n3:domaciTvurceVysledku
n8:7465416 n8:5225450 Neykova, Neda n8:9994602
n3:druhVysledku
n19:J
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
134833
n3:idVysledku
RIV/68378271:_____/12:00390080
n3:jazykVysledku
n5:eng
n3:klicovaSlova
encapsulated diamond transistors; hydrogen plasma
n3:klicoveSlovo
n16:encapsulated%20diamond%20transistors n16:hydrogen%20plasma
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[5F9AE6F3CBC9]
n3:nazevZdroje
Acta Universitatis Carolinae. Mathematica et Physica
n3:obor
n13:BM
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n9:GBP108%2F12%2FG108 n9:GD202%2F09%2FH041 n9:GAP108%2F12%2F0996
n3:rokUplatneniVysledku
n14:2012
n3:svazekPeriodika
53
n3:tvurceVysledku
Krátká, Marie Kromka, Alexander Neykova, Neda Rezek, Bohuslav
n3:zamer
n18:AV0Z10100521
s:issn
0001-7140
s:numberOfPages
7