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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n10http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n8http://linked.opendata.cz/resource/domain/vavai/projekt/
n16http://linked.opendata.cz/resource/domain/vavai/subjekt/
n14http://linked.opendata.cz/ontology/domain/vavai/
n18http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n4http://linked.opendata.cz/ontology/domain/vavai/riv/
n20http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68378271%3A_____%2F12%3A00377789%21RIV13-GA0-68378271/
n19http://bibframe.org/vocab/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n12http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n9http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n15http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n5http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n11http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n6http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F12%3A00377789%21RIV13-GA0-68378271
rdf:type
n14:Vysledek skos:Concept
dcterms:description
Diamond thin films were grown by linear antenna microwave plasma CVD process over large areas (up to 20 10 cm2) from a hydrogen based gas mixture. The influence of the gas coDmposition (H2, CH4, CO2) and total gas pressure (0.1 and 2 mbar) on the film growth is presented. For CH4/H2 gas mixtures, the surface crystal size does not show dependence on the methane concentration and total pressure and remains below 50 nm as observed by SEM. Adding CO2 (up to 10%) significantly improves the growth rate. However, still no significant change of morphology is observed on films grown at 2 mbar. The crucial improvement of the diamond film purity (as detected by Raman spectroscopy) and crystal size is found for deposition at 0.1 mbar. In this case, crystals are as large as 500 nm and the growth rate increases up to 38 nm/h. Diamond thin films were grown by linear antenna microwave plasma CVD process over large areas (up to 20 10 cm2) from a hydrogen based gas mixture. The influence of the gas coDmposition (H2, CH4, CO2) and total gas pressure (0.1 and 2 mbar) on the film growth is presented. For CH4/H2 gas mixtures, the surface crystal size does not show dependence on the methane concentration and total pressure and remains below 50 nm as observed by SEM. Adding CO2 (up to 10%) significantly improves the growth rate. However, still no significant change of morphology is observed on films grown at 2 mbar. The crucial improvement of the diamond film purity (as detected by Raman spectroscopy) and crystal size is found for deposition at 0.1 mbar. In this case, crystals are as large as 500 nm and the growth rate increases up to 38 nm/h.
dcterms:title
Linear antenna microwave plasma CVD deposition of diamond films over large areas Linear antenna microwave plasma CVD deposition of diamond films over large areas
skos:prefLabel
Linear antenna microwave plasma CVD deposition of diamond films over large areas Linear antenna microwave plasma CVD deposition of diamond films over large areas
skos:notation
RIV/68378271:_____/12:00377789!RIV13-GA0-68378271
n14:predkladatel
n16:ico%3A68378271
n4:aktivita
n5:Z n5:P
n4:aktivity
P(GAP108/11/0794), P(IAAX00100902), P(KAN400100701), P(LC510), Z(AV0Z10100521)
n4:cisloPeriodika
6
n4:dodaniDat
n6:2013
n4:domaciTvurceVysledku
n10:7465416 n10:9994602 Ižák, Tibor Babchenko, Oleg n10:5635853
n4:druhVysledku
n11:J
n4:duvernostUdaju
n9:S
n4:entitaPredkladatele
n20:predkladatel
n4:idSjednocenehoVysledku
147113
n4:idVysledku
RIV/68378271:_____/12:00377789
n4:jazykVysledku
n15:eng
n4:klicovaSlova
diamond; large area deposition; linear antenna microwave plasma
n4:klicoveSlovo
n12:diamond n12:linear%20antenna%20microwave%20plasma n12:large%20area%20deposition
n4:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n4:kontrolniKodProRIV
[BD177E651727]
n4:nazevZdroje
Vacuum
n4:obor
n17:BM
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
5
n4:projekt
n8:LC510 n8:IAAX00100902 n8:GAP108%2F11%2F0794 n8:KAN400100701
n4:rokUplatneniVysledku
n6:2012
n4:svazekPeriodika
86
n4:tvurceVysledku
Ižák, Tibor Rezek, Bohuslav Babchenko, Oleg Hruška, Karel Kromka, Alexander
n4:wos
000301018400048
n4:zamer
n18:AV0Z10100521
s:issn
0042-207X
s:numberOfPages
4
n19:doi
10.1016/j.vacuum.2011.07.008