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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F11%3A00433409%21RIV15-AV0-68378271
rdf:type
n5:Vysledek skos:Concept
dcterms:description
Efficient growth of nanocrystalline diamond (NCD) requires nucleation enhancement before chemical vapour deposition step. Nanodiamond (ND) seeding is a commonly used technique that yields high nucleation densities. This technique is well established for conventional planar substrates with low surface roughness. However, many engineering application requires NCD grow on rough and/or non-planar substrates. In this work, we investigate quality of nanodiamond seeding on silicon substrates of high surface roughness (RMS roughness <1 mm). Seeded substrates and deposited diamond films were analysed by atomic force microscopy (AFM), scanning electron microscopy (SEM) and Raman spectroscopy. We discuss influence of nanodiamond particles in seeding solution and seeding technique on nucleation density and quality of deposited NCD film. Efficient growth of nanocrystalline diamond (NCD) requires nucleation enhancement before chemical vapour deposition step. Nanodiamond (ND) seeding is a commonly used technique that yields high nucleation densities. This technique is well established for conventional planar substrates with low surface roughness. However, many engineering application requires NCD grow on rough and/or non-planar substrates. In this work, we investigate quality of nanodiamond seeding on silicon substrates of high surface roughness (RMS roughness <1 mm). Seeded substrates and deposited diamond films were analysed by atomic force microscopy (AFM), scanning electron microscopy (SEM) and Raman spectroscopy. We discuss influence of nanodiamond particles in seeding solution and seeding technique on nucleation density and quality of deposited NCD film.
dcterms:title
Nanodiamond seeding of rough substrates Nanodiamond seeding of rough substrates
skos:prefLabel
Nanodiamond seeding of rough substrates Nanodiamond seeding of rough substrates
skos:notation
RIV/68378271:_____/11:00433409!RIV15-AV0-68378271
n3:aktivita
n14:P n14:I
n3:aktivity
I, P(KAN200100801), P(KAN400480701), P(LD11076)
n3:dodaniDat
n11:2015
n3:domaciTvurceVysledku
n13:2899841 Taylor, Andrew n13:8638519
n3:druhVysledku
n4:D
n3:duvernostUdaju
n9:S
n3:entitaPredkladatele
n20:predkladatel
n3:idSjednocenehoVysledku
214757
n3:idVysledku
RIV/68378271:_____/11:00433409
n3:jazykVysledku
n15:eng
n3:klicovaSlova
nanocrystalline diamond; rough silicon
n3:klicoveSlovo
n6:rough%20silicon n6:nanocrystalline%20diamond
n3:kontrolniKodProRIV
[C62ABBB0F278]
n3:mistoKonaniAkce
Kladno
n3:mistoVydani
Prague
n3:nazevZdroje
Instruments and methods for biology and medicine 2011, Conference proceedings
n3:obor
n10:BM
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
7
n3:projekt
n16:KAN200100801 n16:LD11076 n16:KAN400480701
n3:rokUplatneniVysledku
n11:2011
n3:tvurceVysledku
Petrák, V. Fekete, Ladislav Taylor, Andrew Fendrych, František Stefanovič, M. Nesládek, M. Vlčková, M.
n3:typAkce
n19:CST
n3:zahajeniAkce
2011-06-02+02:00
s:numberOfPages
5
n18:hasPublisher
České vysoké učení technické v Praze
n12:isbn
978-80-01-04915-0