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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F11%3A00374830%21RIV12-AV0-68378271
rdf:type
skos:Concept n17:Vysledek
dcterms:description
A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area. A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
dcterms:title
Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
skos:prefLabel
Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
skos:notation
RIV/68378271:_____/11:00374830!RIV12-AV0-68378271
n17:predkladatel
n20:ico%3A68378271
n3:aktivita
n4:Z n4:P
n3:aktivity
P(GAP108/11/0794), P(IAAX00100902), P(KAN400100701), P(MEB0810082), Z(AV0Z10100521)
n3:dodaniDat
n11:2012
n3:domaciTvurceVysledku
n5:9858601 n5:7166494 n5:7465416 n5:5635853 Kozak, Halina Ižák, Tibor Babchenko, Oleg Neykova, Neda n5:6812872 n5:9994602
n3:druhVysledku
n14:D
n3:duvernostUdaju
n22:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
225263
n3:idVysledku
RIV/68378271:_____/11:00374830
n3:jazykVysledku
n15:eng
n3:klicovaSlova
microwave plasma; CVD deposition; diamond; CNT; graphene
n3:klicoveSlovo
n8:CNT n8:graphene n8:microwave%20plasma n8:diamond n8:CVD%20deposition
n3:kontrolniKodProRIV
[861779F08B00]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Ostrava
n3:nazevZdroje
NANOCON 2011. Conference proceedings
n3:obor
n6:BM
n3:pocetDomacichTvurcuVysledku
10
n3:pocetTvurcuVysledku
10
n3:projekt
n13:GAP108%2F11%2F0794 n13:IAAX00100902 n13:MEB0810082 n13:KAN400100701
n3:rokUplatneniVysledku
n11:2011
n3:tvurceVysledku
Babchenko, Oleg Hruška, Karel Kozak, Halina Rezek, Bohuslav Kromka, Alexander Davydova, Marina Remeš, Zdeněk Potocký, Štěpán Neykova, Neda Ižák, Tibor
n3:typAkce
n19:WRD
n3:zahajeniAkce
2011-09-21+02:00
n3:zamer
n9:AV0Z10100521
s:numberOfPages
9
n16:hasPublisher
Tanger Ltd
n12:isbn
978-80-87294-27-7