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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n6http://linked.opendata.cz/resource/domain/vavai/projekt/
n4http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n18http://linked.opendata.cz/resource/domain/vavai/subjekt/
n9http://linked.opendata.cz/ontology/domain/vavai/
n12http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n20http://bibframe.org/vocab/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n8http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n19http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n13http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n5http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n10http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n16http://reference.data.gov.uk/id/gregorian-year/
n11http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68378271%3A_____%2F11%3A00364640%21RIV12-AV0-68378271/

Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F11%3A00364640%21RIV12-AV0-68378271
rdf:type
skos:Concept n9:Vysledek
dcterms:description
A High Power Impulse Magnetron Sputtering System(HiPIMS) equipped with a titanium target 5 cm in diameter has been investigated by means of a time-resolved Langmuir probe and time-resolved ion flux probe. The plasma parameters have been measured in a distance of 70 mm from the target face and below the racetrack. The ion flux at the substrate (placed at the same position as the Langmuir probe) has been determined from the voltage drop across a resistor connected with the planar probe. The planar probe was pulsed at a repetition rate of 50 kHz, duty cycle 50%. The effects of working gas pressure and mean discharge current have been investigated. A High Power Impulse Magnetron Sputtering System(HiPIMS) equipped with a titanium target 5 cm in diameter has been investigated by means of a time-resolved Langmuir probe and time-resolved ion flux probe. The plasma parameters have been measured in a distance of 70 mm from the target face and below the racetrack. The ion flux at the substrate (placed at the same position as the Langmuir probe) has been determined from the voltage drop across a resistor connected with the planar probe. The planar probe was pulsed at a repetition rate of 50 kHz, duty cycle 50%. The effects of working gas pressure and mean discharge current have been investigated.
dcterms:title
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere
skos:prefLabel
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere
skos:notation
RIV/68378271:_____/11:00364640!RIV12-AV0-68378271
n9:predkladatel
n18:ico%3A68378271
n3:aktivita
n5:Z n5:P
n3:aktivity
P(1M06002), P(GA202/09/0800), P(GP202/09/P159), P(KAN400720701), P(KJB100100805), Z(AV0Z10100522)
n3:cisloPeriodika
2
n3:dodaniDat
n16:2012
n3:domaciTvurceVysledku
n4:5193222 n4:2296268 n4:9254927 n4:2989034 n4:6779263
n3:druhVysledku
n17:J
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
235389
n3:idVysledku
RIV/68378271:_____/11:00364640
n3:jazykVysledku
n13:eng
n3:klicovaSlova
HiPIMS; Langmuir probe; ion flux; reactive sputtering
n3:klicoveSlovo
n8:Langmuir%20probe n8:ion%20flux n8:HiPIMS n8:reactive%20sputtering
n3:kodStatuVydavatele
CH - Švýcarská konfederace
n3:kontrolniKodProRIV
[DE575CCA8255]
n3:nazevZdroje
Surface and Coatings Technology
n3:obor
n10:BH
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:projekt
n6:1M06002 n6:KJB100100805 n6:KAN400720701 n6:GP202%2F09%2FP159 n6:GA202%2F09%2F0800
n3:rokUplatneniVysledku
n16:2011
n3:svazekPeriodika
205
n3:tvurceVysledku
Adámek, Petr Čada, Martin Jastrabík, Lubomír Klusoň, Jan Hubička, Zdeněk
n3:wos
000293258600068
n3:zamer
n12:AV0Z10100522
s:issn
0257-8972
s:numberOfPages
4
n20:doi
10.1016/j.surfcoat.2010.11.050