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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F10%3A00351617%21RIV11-GA0-68378271
rdf:type
skos:Concept n16:Vysledek
dcterms:description
Ultrathin nanostructured metal films exhibit unusual properties and performances. Film functional properties depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions. Hence, in order to control the nanostructure of aluminium thin film fabricated by RF magnetron sputtering, we focus on in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on a spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline function) are suggested to evaluate the data obtained from the monitoring techniques. The results of the in-situ monitoring are correlated with SEM analyses. We demonstrate the monitoring can distinguish the growth mode in the real-time. Ultrathin nanostructured metal films exhibit unusual properties and performances. Film functional properties depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions. Hence, in order to control the nanostructure of aluminium thin film fabricated by RF magnetron sputtering, we focus on in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on a spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline function) are suggested to evaluate the data obtained from the monitoring techniques. The results of the in-situ monitoring are correlated with SEM analyses. We demonstrate the monitoring can distinguish the growth mode in the real-time.
dcterms:title
Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth
skos:prefLabel
Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth
skos:notation
RIV/68378271:_____/10:00351617!RIV11-GA0-68378271
n3:aktivita
n6:P n6:Z
n3:aktivity
P(GP202/09/P324), P(IAA100100718), P(IAA100100729), P(KAN400100653), Z(AV0Z10100522)
n3:dodaniDat
n12:2011
n3:domaciTvurceVysledku
n8:9640495 n8:7464045 n8:9500774 n8:7772629 n8:7433514
n3:druhVysledku
n20:D
n3:duvernostUdaju
n13:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
258649
n3:idVysledku
RIV/68378271:_____/10:00351617
n3:jazykVysledku
n21:eng
n3:klicovaSlova
aluminium ultra thin film; magnetron sputtering; in-situ monitoring; electrical conductivity; spectral ellipsometry; optical emission spectroscopy
n3:klicoveSlovo
n7:optical%20emission%20spectroscopy n7:aluminium%20ultra%20thin%20film n7:in-situ%20monitoring n7:magnetron%20sputtering n7:electrical%20conductivity n7:spectral%20ellipsometry
n3:kontrolniKodProRIV
[9D18B9480B2B]
n3:mistoKonaniAkce
San Diego
n3:mistoVydani
Bellingham
n3:nazevZdroje
Nanostructured Thin Films III
n3:obor
n14:BM
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
6
n3:projekt
n4:KAN400100653 n4:GP202%2F09%2FP324 n4:IAA100100718 n4:IAA100100729
n3:rokUplatneniVysledku
n12:2010
n3:tvurceVysledku
Bulíř, Jiří Pokorný, Petr Piksová, K. Bodnár, Michal Lančok, Ján Novotný, Michal
n3:typAkce
n17:WRD
n3:zahajeniAkce
2010-08-04+02:00
n3:zamer
n11:AV0Z10100522
s:numberOfPages
8
n9:hasPublisher
SPIE
n15:isbn
9780819482624