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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n12http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n5http://linked.opendata.cz/resource/domain/vavai/projekt/
n10http://linked.opendata.cz/ontology/domain/vavai/
n18http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68378271%3A_____%2F10%3A00349454%21RIV11-AV0-68378271/
n13http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n4http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n6http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n8http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n9http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n15http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F10%3A00349454%21RIV11-AV0-68378271
rdf:type
n10:Vysledek skos:Concept
dcterms:description
Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 – CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown. Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 – CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown.
dcterms:title
Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system
skos:prefLabel
Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system
skos:notation
RIV/68378271:_____/10:00349454!RIV11-AV0-68378271
n4:aktivita
n7:P n7:Z
n4:aktivity
P(KAN200100801), P(KAN300100801), P(KAN301370701), Z(AV0Z10100520)
n4:cisloPeriodika
37
n4:dodaniDat
n15:2011
n4:domaciTvurceVysledku
Taylor, Andrew n12:4909054 n12:9663479 n12:2899841 n12:8638519
n4:druhVysledku
n9:J
n4:duvernostUdaju
n17:S
n4:entitaPredkladatele
n18:predkladatel
n4:idSjednocenehoVysledku
261051
n4:idVysledku
RIV/68378271:_____/10:00349454
n4:jazykVysledku
n8:eng
n4:klicovaSlova
nanodiamond,; thin films; PE MW CVD; linear antennas
n4:klicoveSlovo
n6:PE%20MW%20CVD n6:linear%20antennas n6:nanodiamond n6:thin%20films
n4:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n4:kontrolniKodProRIV
[4ED563615D5F]
n4:nazevZdroje
Journal of Physics D-Applied Physics
n4:obor
n14:BM
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
11
n4:projekt
n5:KAN300100801 n5:KAN200100801 n5:KAN301370701
n4:rokUplatneniVysledku
n15:2010
n4:svazekPeriodika
43
n4:tvurceVysledku
Fendrych, František Taylor, Andrew Nesládek, M. Vlček, J. Petrák, V. Fekete, Ladislav Peksa, Ladislav Liehr, M. Kratochvílová, Irena Řezáčová, V. Kluiber, Z.
n4:wos
000281544100019
n4:zamer
n13:AV0Z10100520
s:issn
0022-3727
s:numberOfPages
6