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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F09%3A00330295%21RIV10-AV0-68378271
rdf:type
skos:Concept n16:Vysledek
dcterms:description
Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings.
dcterms:title
Hybrid laser - magnetron technology for carbon composite coating Hybrid laser - magnetron technology for carbon composite coating
skos:prefLabel
Hybrid laser - magnetron technology for carbon composite coating Hybrid laser - magnetron technology for carbon composite coating
skos:notation
RIV/68378271:_____/09:00330295!RIV10-AV0-68378271
n3:aktivita
n14:Z n14:S n14:P
n3:aktivity
P(GA202/06/0216), P(GA202/07/0591), S, Z(AV0Z10100521), Z(AV0Z10100522)
n3:cisloPeriodika
2
n3:dodaniDat
n12:2010
n3:domaciTvurceVysledku
n9:6323472 n9:7895712 n9:1722247
n3:druhVysledku
n18:J
n3:duvernostUdaju
n13:S
n3:entitaPredkladatele
n6:predkladatel
n3:idSjednocenehoVysledku
318084
n3:idVysledku
RIV/68378271:_____/09:00330295
n3:jazykVysledku
n17:eng
n3:klicovaSlova
SiC; thin films; PLD; hybrid deposition; composites
n3:klicoveSlovo
n4:composites n4:thin%20films n4:SiC n4:hybrid%20deposition n4:PLD
n3:kodStatuVydavatele
RU - Ruská federace
n3:kontrolniKodProRIV
[F4525D9B3D62]
n3:nazevZdroje
Laser Physics
n3:obor
n15:BM
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
4
n3:projekt
n8:GA202%2F07%2F0591 n8:GA202%2F06%2F0216
n3:rokUplatneniVysledku
n12:2009
n3:svazekPeriodika
19
n3:tvurceVysledku
Jelínek, Miroslav Zemek, Josef Kadlec, J. Kocourek, Tomáš
n3:wos
000263260200001
n3:zamer
n10:AV0Z10100522 n10:AV0Z10100521
s:issn
1054-660X
s:numberOfPages
5