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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F06%3A00097902%21RIV12-AV0-68378271
rdf:type
skos:Concept n13:Vysledek
dcterms:description
DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, elektron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, elektron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure
dcterms:title
Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge
skos:prefLabel
Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge
skos:notation
RIV/68378271:_____/06:00097902!RIV12-AV0-68378271
n3:aktivita
n10:Z n10:P
n3:aktivity
P(GA202/05/2242), P(GA202/06/0776), Z(AV0Z10100522), Z(MSM0021620834)
n3:cisloPeriodika
-
n3:dodaniDat
n12:2012
n3:domaciTvurceVysledku
n15:2296268
n3:druhVysledku
n18:J
n3:duvernostUdaju
n6:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
480368
n3:idVysledku
RIV/68378271:_____/06:00097902
n3:jazykVysledku
n14:eng
n3:klicovaSlova
pulsed magnetron; time resolved measurements; Langmuir probe
n3:klicoveSlovo
n7:pulsed%20magnetron n7:time%20resolved%20measurements n7:Langmuir%20probe
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[A4DC46CFD65F]
n3:nazevZdroje
Czechoslovak Journal of Physics
n3:obor
n4:BL
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
8
n3:projekt
n8:GA202%2F05%2F2242 n8:GA202%2F06%2F0776
n3:rokUplatneniVysledku
n12:2006
n3:svazekPeriodika
56
n3:tvurceVysledku
Adámek, P. Wrehde, S. Tichý, M. Špatenka, P. Blažek, J. Hubička, Zdeněk Straňák, V. Hippler, R.
n3:wos
000241337100017
n3:zamer
n11:AV0Z10100522 n11:MSM0021620834
s:issn
0011-4626
s:numberOfPages
7