This HTML5 document contains 57 embedded RDF statements represented using HTML+Microdata notation.

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Namespace Prefixes

PrefixIRI
n4http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n11http://purl.org/net/nknouf/ns/bibtex#
n6http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n13http://linked.opendata.cz/ontology/domain/vavai/
n15http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n18http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68378271%3A_____%2F05%3A00031345%21RIV06-AV0-68378271/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n5http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n10http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n17http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n12http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n19http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n16http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F05%3A00031345%21RIV06-AV0-68378271
rdf:type
skos:Concept n13:Vysledek
dcterms:description
In this contribution we describe the characterization and optimization of laser-produced Ge ion fluxes as well as analysis of the direct implantation of these ions into Si and SiO2 substrates at the PALS. The Ge target was irradiated using laser pulses of energy up to 50 J. The maximum depth of implantation of Ge ions was ~450nm. In this contribution we describe the characterization and optimization of laser-produced Ge ion fluxes as well as analysis of the direct implantation of these ions into Si and SiO2 substrates at the PALS. The Ge target was irradiated using laser pulses of energy up to 50 J. The maximum depth of implantation of Ge ions was ~450nm. V tomto příspěvku je charakterizován optimalizovaný tok Ge iontů, získaný ozářením Ge terčíku pulsy jodového laseru PALS o energiích do 50 J, a analyzována přímá implantace těchto iontů do Si a SiO2 podložek. Maximální hloubka implantace Ge iontů byla ~450nm.
dcterms:title
Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates Studium plazmatu produkovaného laserovými pulsy o vysoké energii a nízké intenzitě pro implantaci Ge iontů do Si a SiO2 podložek Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates
skos:prefLabel
Studium plazmatu produkovaného laserovými pulsy o vysoké energii a nízké intenzitě pro implantaci Ge iontů do Si a SiO2 podložek Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates
skos:notation
RIV/68378271:_____/05:00031345!RIV06-AV0-68378271
n3:strany
303;306
n3:aktivita
n12:Z
n3:aktivity
Z(AV0Z10100523)
n3:dodaniDat
n16:2006
n3:domaciTvurceVysledku
n6:2765640 n6:9047883 n6:3479021 n6:9436103
n3:druhVysledku
n19:D
n3:duvernostUdaju
n10:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
525615
n3:idVysledku
RIV/68378271:_____/05:00031345
n3:jazykVysledku
n17:eng
n3:klicovaSlova
laser plasma; Ge ions; laser implantation
n3:klicoveSlovo
n5:laser%20plasma n5:Ge%20ions n5:laser%20implantation
n3:kontrolniKodProRIV
[1267E09FF2C3]
n3:mistoKonaniAkce
Opole-Turawa
n3:mistoVydani
Melville
n3:nazevZdroje
PLASMA 2005: Int. Conf. on Research and Applications of Plasmas; 3rd German-Polish Conf.on Plasma Diagnostics for Fusion and Applications; 5th French-Polish Seminar on Thermal Plasma in Space and Labo
n3:obor
n14:BH
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
13
n3:rokUplatneniVysledku
n16:2005
n3:tvurceVysledku
Ullschmied, Jiří Rohlena, Karel Torrisi, L. Pfeifer, Miroslav Láska, Leoš Wolowski, J. Krása, Josef Parys, P. Mezzasalma, A. Rosinski, M. Boody, F. P. Badziak, J. Gammino, S.
n3:typAkce
n4:EUR
n3:zahajeniAkce
2005-09-06+02:00
n3:zamer
n15:AV0Z10100523
s:issn
0094-243X
s:numberOfPages
6
n11:hasPublisher
American Institut of Physics