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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F03%3A02030256%21RIV%2F2004%2FAV0%2FA02004%2FN
rdf:type
n6:Vysledek skos:Concept
dcterms:description
The microwave electron cyclotron resonance/r.f. discharge in methane/argon working gas has been studied by a means of energy resolved ion mass spectrometry.The ion energy distribution and composition of the ion flux at a substrate was measured for microwave power ranging from 50 to 600 W, r.f. biases from 0 to -200 V and total pressure from 0.05 to 1 Pa. The microwave electron cyclotron resonance/r.f. discharge in methane/argon working gas has been studied by a means of energy resolved ion mass spectrometry.The ion energy distribution and composition of the ion flux at a substrate was measured for microwave power ranging from 50 to 600 W, r.f. biases from 0 to -200 V and total pressure from 0.05 to 1 Pa.
dcterms:title
Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma. Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma.
skos:prefLabel
Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma. Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma.
skos:notation
RIV/68378271:_____/03:02030256!RIV/2004/AV0/A02004/N
n3:strany
914;917
n3:aktivita
n4:P n4:Z
n3:aktivity
P(GA106/99/D086), P(ME 455), Z(AV0Z1010914)
n3:cisloPeriodika
N/A
n3:dodaniDat
n16:2004
n3:domaciTvurceVysledku
n7:3060772 n7:7464045
n3:druhVysledku
n9:J
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
605941
n3:idVysledku
RIV/68378271:_____/03:02030256
n3:jazykVysledku
n14:eng
n3:klicovaSlova
mass spectrometry; ion energy; methane; PE CVD
n3:klicoveSlovo
n5:ion%20energy n5:methane n5:PE%20CVD n5:mass%20spectrometry
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[34499ADFBAD1]
n3:nazevZdroje
Surface and Coating Technology
n3:obor
n15:BM
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:projekt
n13:GA106%2F99%2FD086 n13:ME%20455
n3:rokUplatneniVysledku
n16:2003
n3:svazekPeriodika
173-174
n3:tvurceVysledku
Mišina, Martin Pokorný, Petr
n3:zamer
n17:AV0Z1010914
s:issn
0257-8972
s:numberOfPages
4