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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F03%3A02030180%21RIV%2F2004%2FAV0%2FA02004%2FN
rdf:type
n12:Vysledek skos:Concept
dcterms:description
White-light interferometry is an established method for the height-profile measurement of rough surface. we show the results of the heigh-profile measurement of silicon waters. White-light interferometry is an established method for the height-profile measurement of rough surface. we show the results of the heigh-profile measurement of silicon waters.
dcterms:title
Height profile measurement by means of white-light interferometry. Height profile measurement by means of white-light interferometry.
skos:prefLabel
Height profile measurement by means of white-light interferometry. Height profile measurement by means of white-light interferometry.
skos:notation
RIV/68378271:_____/03:02030180!RIV/2004/AV0/A02004/N
n3:strany
1;7
n3:aktivita
n4:P n4:Z
n3:aktivity
P(LN00A015), Z(AV0Z1010914), Z(AV0Z1010921)
n3:dodaniDat
n6:2004
n3:domaciTvurceVysledku
n13:1332333
n3:druhVysledku
n7:D
n3:duvernostUdaju
n16:S
n3:entitaPredkladatele
n8:predkladatel
n3:idSjednocenehoVysledku
608725
n3:idVysledku
RIV/68378271:_____/03:02030180
n3:jazykVysledku
n5:eng
n3:klicovaSlova
white-light interferometry; height profile measurement; rough surface
n3:klicoveSlovo
n10:height%20profile%20measurement n10:rough%20surface n10:white-light%20interferometry
n3:kontrolniKodProRIV
[9501EA10DF47]
n3:mistoKonaniAkce
Svratka [CZ]
n3:mistoVydani
Žd'ár nad Sázavou
n3:nazevZdroje
Engineering Mechanics 2003.
n3:obor
n14:BH
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
1
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:projekt
n19:LN00A015
n3:rokUplatneniVysledku
n6:2003
n3:tvurceVysledku
Pavlíček, Pavel
n3:typAkce
n18:EUR
n3:zahajeniAkce
2003-05-12+02:00
n3:zamer
n20:AV0Z1010921 n20:AV0Z1010914
s:numberOfPages
7
n15:hasPublisher
Ústav teoretické a aplikované mechaniky AV ČR