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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F01%3A02010165%21RIV%2F2003%2FAV0%2FA02003%2FN
rdf:type
skos:Concept n14:Vysledek
dcterms:description
In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2. In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2.
dcterms:title
Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering. Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.
skos:prefLabel
Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering. Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.
skos:notation
RIV/68378271:_____/01:02010165!RIV/2003/AV0/A02003/N
n4:strany
1076;1081
n4:aktivita
n6:Z n6:P
n4:aktivity
P(GA202/00/1592), P(ME 305), Z(AV0Z1010914), Z(MSM 210000021)
n4:cisloPeriodika
N/A
n4:dodaniDat
n12:2003
n4:domaciTvurceVysledku
n7:5585457 Deineka, Alexander n7:5594189 n7:5662281 n7:5193222
n4:druhVysledku
n15:J
n4:duvernostUdaju
n5:S
n4:entitaPredkladatele
n17:predkladatel
n4:idSjednocenehoVysledku
681466
n4:idVysledku
RIV/68378271:_____/01:02010165
n4:jazykVysledku
n16:eng
n4:klicovaSlova
diamond-like carbon; - structure; - stress; hardness
n4:klicoveSlovo
n11:-%20stress n11:diamond-like%20carbon n11:-%20structure n11:hardness
n4:kodStatuVydavatele
CH - Švýcarská konfederace
n4:kontrolniKodProRIV
[A422E3352AB9]
n4:nazevZdroje
Diamond and Related Materials
n4:obor
n10:BM
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
6
n4:pocetUcastnikuAkce
0
n4:pocetZahranicnichUcastnikuAkce
0
n4:projekt
n13:ME%20305 n13:GA202%2F00%2F1592
n4:rokUplatneniVysledku
n12:2001
n4:svazekPeriodika
10
n4:tvurceVysledku
Deineka, Alexander Franc, František Kulikovsky, V. Vorlíček, Vladimír Jastrabík, Lubomír Boháč, Petr
n4:zamer
n18:MSM%20210000021 n18:AV0Z1010914
s:issn
0925-9635
s:numberOfPages
6