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Statements

Subject Item
n2:RIV%2F68378271%3A_____%2F01%3A00100169%21RIV%2F2005%2FAV0%2FA02005%2FN
rdf:type
skos:Concept n17:Vysledek
dcterms:description
Jsou prezentována některá pozorování vývoje vnitřních pnutí a degradace diamantu podobných vrstev a-C, a-C:H a Ti-C (10-20 at.% Ti) deponovaných magnetronovým naprašováním z C nebo Ti targetů v Ar nebo směsi Ar+CH4. Tlaková pnutí rostla v průběhu několika dní ve filmech Ti-C:H, nerostla ve vrstvách a-C. Růst pnutí byl provázen poklesem optických konstant n a k Some observations of the stress evolution and degradations of diamond-like a-C, a-C:H and Ti-C (10-20 at.% of Ti) films deposited by magnetron sputtering of the C or Ti target in the Ar or Ar+CH4 gas mixture are presented. The compressive stress increased during several days for Ti-C:H films but not for a-C films. The growth of stress was accompanied by a decrease of optical constants n and k Some observations of the stress evolution and degradations of diamond-like a-C, a-C:H and Ti-C (10-20 at.% of Ti) films deposited by magnetron sputtering of the C or Ti target in the Ar or Ar+CH4 gas mixture are presented. The compressive stress increased during several days for Ti-C:H films but not for a-C films. The growth of stress was accompanied by a decrease of optical constants n and k
dcterms:title
Degradation and stress evolution in a-C, a-C:H a Ti-C:H films Degradation and stress evolution in a-C, a-C:H a Ti-C:H films Degradace a vývoj pnutí ve vrstvách a-C, a-C:H a Ti-C:H
skos:prefLabel
Degradation and stress evolution in a-C, a-C:H a Ti-C:H films Degradace a vývoj pnutí ve vrstvách a-C, a-C:H a Ti-C:H Degradation and stress evolution in a-C, a-C:H a Ti-C:H films
skos:notation
RIV/68378271:_____/01:00100169!RIV/2005/AV0/A02005/N
n3:strany
702;706
n3:aktivita
n7:Z n7:P
n3:aktivity
P(LN00A015), Z(AV0Z1010914)
n3:cisloPeriodika
-
n3:dodaniDat
n4:2005
n3:domaciTvurceVysledku
n5:5585457 n5:5594189 n5:6658776 n5:5662281 Deyneka, Alexander n5:5193222 n5:6208991
n3:druhVysledku
n15:J
n3:duvernostUdaju
n8:S
n3:entitaPredkladatele
n16:predkladatel
n3:idSjednocenehoVysledku
677033
n3:idVysledku
RIV/68378271:_____/01:00100169
n3:jazykVysledku
n14:eng
n3:klicovaSlova
sputtering; diamond-like carbon; stress evolution; coating degradation
n3:klicoveSlovo
n9:sputtering n9:diamond-like%20carbon n9:stress%20evolution n9:coating%20degradation
n3:kodStatuVydavatele
CH - Švýcarská konfederace
n3:kontrolniKodProRIV
[6BE920643262]
n3:nazevZdroje
Surface and Coatings Technology
n3:obor
n10:BM
n3:pocetDomacichTvurcuVysledku
7
n3:pocetTvurcuVysledku
7
n3:projekt
n11:LN00A015
n3:rokUplatneniVysledku
n4:2001
n3:svazekPeriodika
142-144
n3:tvurceVysledku
Jastrabík, Lubomír Vorlíček, Vladimír Chvostová, Dagmar Franc, František Deyneka, Alexander Kulykovskyy, Valeriy Boháč, Petr
n3:zamer
n18:AV0Z1010914
s:issn
0257-8972
s:numberOfPages
5