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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F14%3A00431959%21RIV15-TA0-68081731
rdf:type
n4:Vysledek skos:Concept
dcterms:description
We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
dcterms:title
6-axis interferometric coordinates measurement system for nanometrology 6-axis interferometric coordinates measurement system for nanometrology
skos:prefLabel
6-axis interferometric coordinates measurement system for nanometrology 6-axis interferometric coordinates measurement system for nanometrology
skos:notation
RIV/68081731:_____/14:00431959!RIV15-TA0-68081731
n3:aktivita
n20:P n20:I
n3:aktivity
I, P(ED0017/01/01), P(EE2.4.31.0016), P(GPP102/11/P820), P(LO1212), P(TA02010711), P(TE01020233)
n3:dodaniDat
n16:2015
n3:domaciTvurceVysledku
n11:5629802 n11:4930010 n11:9233598 n11:5170230 n11:7047215 n11:5467853 n11:2430320
n3:druhVysledku
n7:D
n3:duvernostUdaju
n18:S
n3:entitaPredkladatele
n15:predkladatel
n3:idSjednocenehoVysledku
58342
n3:idVysledku
RIV/68081731:_____/14:00431959
n3:jazykVysledku
n9:eng
n3:klicovaSlova
nanometrology; AFM; nanoscale; nanopositioning interferometry
n3:klicoveSlovo
n6:AFM n6:nanopositioning%20interferometry n6:nanometrology n6:nanoscale
n3:kontrolniKodProRIV
[2258339EBB91]
n3:mistoKonaniAkce
San Francisco
n3:mistoVydani
Bellingham
n3:nazevZdroje
Photonic Instrumentation Engineering (Proceedings of Spie 8992)
n3:obor
n19:BH
n3:pocetDomacichTvurcuVysledku
7
n3:pocetTvurcuVysledku
9
n3:projekt
n12:TE01020233 n12:ED0017%2F01%2F01 n12:EE2.4.31.0016 n12:TA02010711 n12:LO1212 n12:GPP102%2F11%2FP820
n3:rokUplatneniVysledku
n16:2014
n3:tvurceVysledku
Valtr, M. Oulehla, Jindřich Holá, Miroslava Hrabina, Jan Šerý, Mojmír Číp, Ondřej Lazar, Josef Klapetek, P. Čížek, Martin
n3:typAkce
n10:WRD
n3:wos
000337143700023
n3:zahajeniAkce
2014-02-02+01:00
s:issn
0277-786X
s:numberOfPages
8
n17:doi
10.1117/12.2054802
n13:hasPublisher
SPIE