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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F13%3A00398400%21RIV14-TA0-68081731
rdf:type
skos:Concept n12:Vysledek
dcterms:description
We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing the greatest source of uncertainty. Our proposal is based on the concept of combining overdetermined interferometric setup where a reference wavelength is derived from a mechanical reference for compensation of fast fluctuations and traditional indirect evaluation of the refractive index compensating on the other hand the long-term drift of the mechanical reference caused by thermal expansion. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing the greatest source of uncertainty. Our proposal is based on the concept of combining overdetermined interferometric setup where a reference wavelength is derived from a mechanical reference for compensation of fast fluctuations and traditional indirect evaluation of the refractive index compensating on the other hand the long-term drift of the mechanical reference caused by thermal expansion. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
dcterms:title
Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology
skos:prefLabel
Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology
skos:notation
RIV/68081731:_____/13:00398400!RIV14-TA0-68081731
n12:predkladatel
n13:ico%3A68081731
n3:aktivita
n21:P n21:I
n3:aktivity
I, P(ED0017/01/01), P(EE2.4.31.0016), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
n3:dodaniDat
n17:2014
n3:domaciTvurceVysledku
n16:9233598 n16:5467853 n16:7047215 n16:2430320 n16:2062976
n3:druhVysledku
n20:D
n3:duvernostUdaju
n8:S
n3:entitaPredkladatele
n7:predkladatel
n3:idSjednocenehoVysledku
80741
n3:idVysledku
RIV/68081731:_____/13:00398400
n3:jazykVysledku
n19:eng
n3:klicovaSlova
Nanometrology; Interferometry; Refractometry
n3:klicoveSlovo
n4:Interferometry n4:Refractometry n4:Nanometrology
n3:kontrolniKodProRIV
[E32706E741CA]
n3:mistoKonaniAkce
Guiyang
n3:mistoVydani
Bellingham
n3:nazevZdroje
Sixth International Symposium on Precision Mechanical Measurements (Proceedings of SPIE 8916)
n3:obor
n15:BH
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:projekt
n5:TA02010711 n5:TE01020233 n5:EE2.4.31.0016 n5:ED0017%2F01%2F01 n5:GPP102%2F11%2FP820
n3:rokUplatneniVysledku
n17:2013
n3:tvurceVysledku
Holá, Miroslava Lazar, Josef Hrabina, Jan Buchta, Zdeněk Číp, Ondřej
n3:typAkce
n11:WRD
n3:zahajeniAkce
2013-10-10+02:00
s:issn
0277-786X
s:numberOfPages
6
n6:doi
10.1117/12.2035553
n9:hasPublisher
SPIE