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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F13%3A00397860%21RIV14-TA0-68081731
rdf:type
skos:Concept n13:Vysledek
dcterms:description
We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
dcterms:title
Interferometric coordinates measurement sytem for local probe microscopy nanometrology Interferometric coordinates measurement sytem for local probe microscopy nanometrology
skos:prefLabel
Interferometric coordinates measurement sytem for local probe microscopy nanometrology Interferometric coordinates measurement sytem for local probe microscopy nanometrology
skos:notation
RIV/68081731:_____/13:00397860!RIV14-TA0-68081731
n13:predkladatel
n14:ico%3A68081731
n3:aktivita
n20:I n20:P
n3:aktivity
I, P(ED0017/01/01), P(EE2.4.31.0016), P(FR-TI2/705), P(GPP102/11/P820), P(TA01010995), P(TA02010711), P(TE01020233)
n3:dodaniDat
n17:2014
n3:domaciTvurceVysledku
n9:5629802 n9:9233598 n9:5467853 n9:7047215 n9:2430320 n9:5170230
n3:druhVysledku
n18:D
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
80736
n3:idVysledku
RIV/68081731:_____/13:00397860
n3:jazykVysledku
n19:eng
n3:klicovaSlova
Nanometrology; Interferometry; Traceability; Local probe microscopy; Nanopositioning
n3:klicoveSlovo
n6:Traceability n6:Interferometry n6:Local%20probe%20microscopy n6:Nanometrology n6:Nanopositioning
n3:kontrolniKodProRIV
[FE914B25E0A6]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Ostrava
n3:nazevZdroje
NANOCON 2013. 5th International Conference Proceedings
n3:obor
n16:BH
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
7
n3:projekt
n4:GPP102%2F11%2FP820 n4:TA02010711 n4:TE01020233 n4:FR-TI2%2F705 n4:TA01010995 n4:EE2.4.31.0016 n4:ED0017%2F01%2F01
n3:rokUplatneniVysledku
n17:2013
n3:tvurceVysledku
Holá, Miroslava Lazar, Josef Klepetek, P. Čížek, Martin Hrabina, Jan Šerý, Mojmír Číp, Ondřej
n3:typAkce
n7:WRD
n3:zahajeniAkce
2013-10-16+02:00
s:numberOfPages
6
n21:hasPublisher
TANGER Ltd
n15:isbn
978-80-87294-44-4