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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F13%3A00397634%21RIV14-TA0-68081731
rdf:type
skos:Concept n7:Vysledek
dcterms:description
In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern. In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern.
dcterms:title
Modified knife-edge method for current density distribution measurements in e-beam writers Modified knife-edge method for current density distribution measurements in e-beam writers
skos:prefLabel
Modified knife-edge method for current density distribution measurements in e-beam writers Modified knife-edge method for current density distribution measurements in e-beam writers
skos:notation
RIV/68081731:_____/13:00397634!RIV14-TA0-68081731
n7:predkladatel
n17:ico%3A68081731
n3:aktivita
n16:I n16:P
n3:aktivity
I, P(ED0017/01/01), P(TE01020118)
n3:cisloPeriodika
3
n3:dodaniDat
n15:2014
n3:domaciTvurceVysledku
n4:5422043 n4:5892457 n4:3455599 n4:4182170 n4:1259458
n3:druhVysledku
n18:J
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
89177
n3:idVysledku
RIV/68081731:_____/13:00397634
n3:jazykVysledku
n10:eng
n3:klicovaSlova
electron-beam; intensity distribution; aperture; detector; profile; size
n3:klicoveSlovo
n6:aperture n6:size n6:electron-beam n6:detector n6:profile n6:intensity%20distribution
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[C1296A28A640]
n3:nazevZdroje
Journal of Vacuum Science & Technology B
n3:obor
n13:JA
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:projekt
n12:TE01020118 n12:ED0017%2F01%2F01
n3:rokUplatneniVysledku
n15:2013
n3:svazekPeriodika
31
n3:tvurceVysledku
Kolařík, Vladimír Horáček, Miroslav Bok, Jan Matějka, František Matějka, Milan
n3:wos
000320130500054
s:issn
1071-1023
s:numberOfPages
6
n8:doi
10.1116/1.4802920