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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F12%3A00386394%21RIV13-AV0-68081731
rdf:type
skos:Concept n12:Vysledek
dcterms:description
Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens (OL) alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups. Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens (OL) alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups.
dcterms:title
Collection contrast in the immersion objective lens of the scanning electron microscope Collection contrast in the immersion objective lens of the scanning electron microscope
skos:prefLabel
Collection contrast in the immersion objective lens of the scanning electron microscope Collection contrast in the immersion objective lens of the scanning electron microscope
skos:notation
RIV/68081731:_____/12:00386394!RIV13-AV0-68081731
n12:predkladatel
n13:ico%3A68081731
n3:aktivita
n18:I n18:P
n3:aktivity
I, P(FR-TI3/323)
n3:dodaniDat
n17:2013
n3:domaciTvurceVysledku
n16:2999625 n16:9612653 n16:7708017
n3:druhVysledku
n9:D
n3:duvernostUdaju
n20:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
127631
n3:idVysledku
RIV/68081731:_____/12:00386394
n3:jazykVysledku
n8:eng
n3:klicovaSlova
scanning electron microscope; collection contrast
n3:klicoveSlovo
n11:scanning%20electron%20microscope n11:collection%20contrast
n3:kontrolniKodProRIV
[50AC3252C2BF]
n3:mistoKonaniAkce
Skalský dvůr
n3:mistoVydani
Brno
n3:nazevZdroje
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
n3:obor
n7:JA
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n21:FR-TI3%2F323
n3:rokUplatneniVysledku
n17:2012
n3:tvurceVysledku
Mika, Filip Konvalina, Ivo Müllerová, Ilona
n3:typAkce
n4:WRD
n3:zahajeniAkce
2012-06-25+02:00
s:numberOfPages
2
n15:hasPublisher
Institute of Scientific Instruments AS CR, v.v.i
n5:isbn
978-80-87441-07-7