This HTML5 document contains 52 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n19http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n21http://purl.org/net/nknouf/ns/bibtex#
n10http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n8http://linked.opendata.cz/resource/domain/vavai/projekt/
n5http://linked.opendata.cz/resource/domain/vavai/subjekt/
n4http://linked.opendata.cz/ontology/domain/vavai/
n7https://schema.org/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n14http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68081731%3A_____%2F12%3A00385784%21RIV13-GA0-68081731/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n6http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n12http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n20http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n18http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n13http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n9http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F12%3A00385784%21RIV13-GA0-68081731
rdf:type
skos:Concept n4:Vysledek
dcterms:description
One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches – at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection and position evaluation. Both frequency noise measurements and amplitude noise measurements were done simultaneously through fast and high dynamic range synchronous sampling to have the possibility to separate the frequency noise and to compare the recorded results. One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches – at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection and position evaluation. Both frequency noise measurements and amplitude noise measurements were done simultaneously through fast and high dynamic range synchronous sampling to have the possibility to separate the frequency noise and to compare the recorded results.
dcterms:title
Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser
skos:prefLabel
Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser
skos:notation
RIV/68081731:_____/12:00385784!RIV13-GA0-68081731
n4:predkladatel
n5:ico%3A68081731
n3:aktivita
n17:I n17:P
n3:aktivity
I, P(ED0017/01/01), P(EE2.4.31.0016), P(GA102/09/1276), P(GPP102/11/P820), P(KAN311610701), P(LC06007), P(TA02010711)
n3:dodaniDat
n9:2013
n3:domaciTvurceVysledku
n10:5467853 n10:2430320 n10:9233598
n3:druhVysledku
n18:D
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n14:predkladatel
n3:idSjednocenehoVysledku
152949
n3:idVysledku
RIV/68081731:_____/12:00385784
n3:jazykVysledku
n20:eng
n3:klicovaSlova
interferometry; nanometrology; laser noise; frequency discriminator; atomic force microscopy
n3:klicoveSlovo
n6:frequency%20discriminator n6:atomic%20force%20microscopy n6:nanometrology n6:interferometry n6:laser%20noise
n3:kontrolniKodProRIV
[40B67AD1E47B]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Ostrava
n3:nazevZdroje
NANOCON 2012, 4th International Conference Proceedings
n3:obor
n13:BH
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n8:LC06007 n8:GA102%2F09%2F1276 n8:TA02010711 n8:EE2.4.31.0016 n8:GPP102%2F11%2FP820 n8:KAN311610701 n8:ED0017%2F01%2F01
n3:rokUplatneniVysledku
n9:2012
n3:tvurceVysledku
Lazar, Josef Číp, Ondřej Hrabina, Jan
n3:typAkce
n19:WRD
n3:zahajeniAkce
2012-10-23+02:00
s:numberOfPages
6
n21:hasPublisher
TANGER Ltd
n7:isbn
978-80-87294-32-1