This HTML5 document contains 53 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n16http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n17http://purl.org/net/nknouf/ns/bibtex#
n12http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n6http://linked.opendata.cz/resource/domain/vavai/projekt/
n9http://linked.opendata.cz/resource/domain/vavai/subjekt/
n8http://linked.opendata.cz/ontology/domain/vavai/
n20https://schema.org/
shttp://schema.org/
n4http://linked.opendata.cz/ontology/domain/vavai/riv/
skoshttp://www.w3.org/2004/02/skos/core#
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n10http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n11http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n15http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n19http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n5http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68081731%3A_____%2F12%3A00385783%21RIV13-GA0-68081731/
n21http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n13http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F12%3A00385783%21RIV13-GA0-68081731
rdf:type
skos:Concept n8:Vysledek
dcterms:description
We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1*E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1*E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1*E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1*E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
dcterms:title
Differential interferometry with suppression of the influence of refractive index of air for nanometrology Differential interferometry with suppression of the influence of refractive index of air for nanometrology
skos:prefLabel
Differential interferometry with suppression of the influence of refractive index of air for nanometrology Differential interferometry with suppression of the influence of refractive index of air for nanometrology
skos:notation
RIV/68081731:_____/12:00385783!RIV13-GA0-68081731
n8:predkladatel
n9:ico%3A68081731
n4:aktivita
n15:P n15:I
n4:aktivity
I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
n4:dodaniDat
n13:2013
n4:domaciTvurceVysledku
n12:9233598 n12:5467853 n12:2062976 n12:2430320 n12:7047215
n4:druhVysledku
n21:D
n4:duvernostUdaju
n11:S
n4:entitaPredkladatele
n5:predkladatel
n4:idSjednocenehoVysledku
131264
n4:idVysledku
RIV/68081731:_____/12:00385783
n4:jazykVysledku
n19:eng
n4:klicovaSlova
refraktometry; nanopositioning; interferometry; nanometrology
n4:klicoveSlovo
n10:interferometry n10:nanometrology n10:nanopositioning n10:refraktometry
n4:kontrolniKodProRIV
[9792F3D1DD9F]
n4:mistoKonaniAkce
Brno
n4:mistoVydani
Ostrava
n4:nazevZdroje
NANOCON 2012, 4th International Conference Proceedings
n4:obor
n7:BH
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
5
n4:projekt
n6:ED0017%2F01%2F01 n6:GA102%2F09%2F1276 n6:TA02010711 n6:TE01020233 n6:GPP102%2F11%2FP820
n4:rokUplatneniVysledku
n13:2012
n4:tvurceVysledku
Lazar, Josef Holá, Miroslava Buchta, Zdeněk Hrabina, Jan Číp, Ondřej
n4:typAkce
n16:WRD
n4:zahajeniAkce
2012-10-23+02:00
s:numberOfPages
6
n17:hasPublisher
TANGER Ltd
n20:isbn
978-80-87294-32-1