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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F12%3A00385285%21RIV13-GA0-68081731
rdf:type
n3:Vysledek skos:Concept
dcterms:description
We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology. We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology.
dcterms:title
Displacement interferometry with stabilization of wavelength in air Displacement interferometry with stabilization of wavelength in air
skos:prefLabel
Displacement interferometry with stabilization of wavelength in air Displacement interferometry with stabilization of wavelength in air
skos:notation
RIV/68081731:_____/12:00385285!RIV13-GA0-68081731
n3:predkladatel
n4:ico%3A68081731
n5:aktivita
n18:I n18:P
n5:aktivity
I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
n5:cisloPeriodika
25
n5:dodaniDat
n9:2013
n5:domaciTvurceVysledku
n7:2430320 n7:9233598 n7:5467853 n7:5629802 n7:7047215 n7:2062976
n5:druhVysledku
n17:J
n5:duvernostUdaju
n15:S
n5:entitaPredkladatele
n11:predkladatel
n5:idSjednocenehoVysledku
131540
n5:idVysledku
RIV/68081731:_____/12:00385285
n5:jazykVysledku
n19:eng
n5:klicovaSlova
interferometry; instrumentation; measurement, and metrology
n5:klicoveSlovo
n12:measurement n12:interferometry n12:and%20metrology n12:instrumentation
n5:kodStatuVydavatele
US - Spojené státy americké
n5:kontrolniKodProRIV
[987A660DF74D]
n5:nazevZdroje
Optics Express
n5:obor
n10:BH
n5:pocetDomacichTvurcuVysledku
6
n5:pocetTvurcuVysledku
6
n5:projekt
n8:ED0017%2F01%2F01 n8:GA102%2F09%2F1276 n8:TE01020233 n8:TA02010711 n8:GPP102%2F11%2FP820
n5:rokUplatneniVysledku
n9:2012
n5:svazekPeriodika
20
n5:tvurceVysledku
Holá, Miroslava Lazar, Josef Hrabina, Jan Čížek, Martin Buchta, Zdeněk Číp, Ondřej
n5:wos
000314746600058
s:issn
1094-4087
s:numberOfPages
8
n16:doi
10.1364/OE.20.027830