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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F12%3A00379916%21RIV12-AV0-68081731
rdf:type
skos:Concept n13:Vysledek
dcterms:description
Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups. Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups.
dcterms:title
Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope
skos:prefLabel
Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope
skos:notation
RIV/68081731:_____/12:00379916!RIV12-AV0-68081731
n13:predkladatel
n14:ico%3A68081731
n3:aktivita
n17:I n17:P
n3:aktivity
I, P(FR-TI3/323)
n3:dodaniDat
n10:2012
n3:domaciTvurceVysledku
n12:2999625 n12:7708017 n12:9612653 n12:5981689
n3:druhVysledku
n20:D
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
123473
n3:idVysledku
RIV/68081731:_____/12:00379916
n3:jazykVysledku
n19:eng
n3:klicovaSlova
scanning electron microscopy; cathode lens; secondary electrons; backscattered electrons
n3:klicoveSlovo
n4:cathode%20lens n4:backscattered%20electrons n4:scanning%20electron%20microscopy n4:secondary%20electrons
n3:kontrolniKodProRIV
[FCD81EE5A258]
n3:mistoKonaniAkce
Perth
n3:mistoVydani
Wembley
n3:nazevZdroje
Coneference Proceedings APMC-10, ICONN 2012 and ACMM-22
n3:obor
n7:JA
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n5:FR-TI3%2F323
n3:rokUplatneniVysledku
n10:2012
n3:tvurceVysledku
Konvalina, Ivo Hovorka, Miloš Mika, Filip Müllerová, Ilona
n3:typAkce
n16:WRD
n3:zahajeniAkce
2012-02-05+01:00
s:numberOfPages
2
n21:hasPublisher
EECW Pty Ltd
n8:isbn
978-1-74052-245-8