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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F11%3A00366031%21RIV12-MSM-68081731
rdf:type
n8:Vysledek skos:Concept
dcterms:description
This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented. This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented.
dcterms:title
Multidimensional interferometric tool for the local probe microscopy nanometrology Multidimensional interferometric tool for the local probe microscopy nanometrology
skos:prefLabel
Multidimensional interferometric tool for the local probe microscopy nanometrology Multidimensional interferometric tool for the local probe microscopy nanometrology
skos:notation
RIV/68081731:_____/11:00366031!RIV12-MSM-68081731
n8:predkladatel
n16:ico%3A68081731
n3:aktivita
n15:Z n15:P
n3:aktivity
P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
n3:cisloPeriodika
9
n3:dodaniDat
n14:2012
n3:domaciTvurceVysledku
n4:2430320 n4:5467853 n4:9233598
n3:druhVysledku
n19:J
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n20:predkladatel
n3:idSjednocenehoVysledku
214205
n3:idVysledku
RIV/68081731:_____/11:00366031
n3:jazykVysledku
n5:eng
n3:klicovaSlova
atomic force microscopy (AFM); nanometrology; nanopositioning interferometry; nanoscale
n3:klicoveSlovo
n11:nanopositioning%20interferometry n11:atomic%20force%20microscopy%20%28AFM%29 n11:nanometrology n11:nanoscale
n3:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n3:kontrolniKodProRIV
[1B26494C47CB]
n3:nazevZdroje
Measurement Science and Technology
n3:obor
n18:BH
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
4
n3:projekt
n10:LC06007 n10:GA102%2F09%2F1276 n10:KAN311610701
n3:rokUplatneniVysledku
n14:2011
n3:svazekPeriodika
22
n3:tvurceVysledku
Klapetek, P. Hrabina, Jan Lazar, Josef Číp, Ondřej
n3:wos
000294764800031
n3:zamer
n13:AV0Z20650511
s:issn
0957-0233
s:numberOfPages
8
n17:doi
10.1088/0957-0233/22/9/094030