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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F11%3A00358594%21RIV12-MSM-68081731
rdf:type
skos:Concept n5:Vysledek
dcterms:description
The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens has to be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented. The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens has to be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented.
dcterms:title
Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens
skos:prefLabel
Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens
skos:notation
RIV/68081731:_____/11:00358594!RIV12-MSM-68081731
n5:predkladatel
n6:ico%3A68081731
n3:aktivita
n16:Z n16:P
n3:aktivity
P(ED0017/01/01), P(GAP102/10/1410), P(IAA100650902), Z(AV0Z20650511)
n3:cisloPeriodika
1
n3:dodaniDat
n8:2012
n3:domaciTvurceVysledku
n9:9612653 n9:7708017
n3:druhVysledku
n19:J
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
224691
n3:idVysledku
RIV/68081731:_____/11:00358594
n3:jazykVysledku
n20:eng
n3:klicovaSlova
cathode lens; compound objective lens; aberration coefficients; spot size; field calculations
n3:klicoveSlovo
n13:compound%20objective%20lens n13:cathode%20lens n13:spot%20size n13:aberration%20coefficients n13:field%20calculations
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[C416D7B5AC48]
n3:nazevZdroje
Nuclear Instruments & Methods in Physics Research Section A
n3:obor
n17:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:projekt
n4:IAA100650902 n4:ED0017%2F01%2F01 n4:GAP102%2F10%2F1410
n3:rokUplatneniVysledku
n8:2011
n3:svazekPeriodika
645
n3:tvurceVysledku
Müllerová, Ilona Konvalina, Ivo
n3:wos
000292713900012
n3:zamer
n18:AV0Z20650511
s:issn
0168-9002
s:numberOfPages
5
n14:doi
10.1016/j.nima.2010.12.232