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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F10%3A00351325%21RIV11-GA0-68081731
rdf:type
n13:Vysledek skos:Concept
dcterms:description
In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology.
dcterms:title
Laser interferometric measuring system for positioning in nanometrology Laser interferometric measuring system for positioning in nanometrology
skos:prefLabel
Laser interferometric measuring system for positioning in nanometrology Laser interferometric measuring system for positioning in nanometrology
skos:notation
RIV/68081731:_____/10:00351325!RIV11-GA0-68081731
n4:aktivita
n12:P n12:Z
n4:aktivity
P(FR-TI1/241), P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
n4:cisloPeriodika
10
n4:dodaniDat
n11:2011
n4:domaciTvurceVysledku
n9:5170230 n9:2430320 n9:5629802 n9:9233598 n9:5467853
n4:druhVysledku
n14:J
n4:duvernostUdaju
n15:S
n4:entitaPredkladatele
n18:predkladatel
n4:idSjednocenehoVysledku
267940
n4:idVysledku
RIV/68081731:_____/10:00351325
n4:jazykVysledku
n10:eng
n4:klicovaSlova
Interferometry; local probe microscopy; nanometrology; nanopositioning; traceability
n4:klicoveSlovo
n8:local%20probe%20microscopy n8:traceability n8:nanometrology n8:nanopositioning n8:Interferometry
n4:kodStatuVydavatele
GR - Řecká republika
n4:kontrolniKodProRIV
[1A20FB61DB1B]
n4:nazevZdroje
WSEAS Transactions on Circuits and Systems
n4:obor
n17:BH
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
5
n4:projekt
n7:GA102%2F09%2F1276 n7:FR-TI1%2F241 n7:KAN311610701 n7:LC06007
n4:rokUplatneniVysledku
n11:2010
n4:svazekPeriodika
9
n4:tvurceVysledku
Čížek, Martin Číp, Ondřej Lazar, Josef Šerý, Mojmír Hrabina, Jan
n4:zamer
n5:AV0Z20650511
s:issn
1109-2734
s:numberOfPages
10