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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F10%3A00350874%21RIV11-GA0-68081731
rdf:type
n11:Vysledek skos:Concept
dcterms:description
A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation. A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation.
dcterms:title
Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
skos:prefLabel
Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
skos:notation
RIV/68081731:_____/10:00350874!RIV11-GA0-68081731
n4:aktivita
n12:Z n12:S n12:P
n4:aktivity
P(GA202/07/1669), P(GA202/09/0800), P(KAN101630651), S, Z(AV0Z20650511), Z(MSM0021622411)
n4:cisloPeriodika
Nov 3
n4:dodaniDat
n14:2011
n4:domaciTvurceVysledku
n9:3319318
n4:druhVysledku
n17:J
n4:duvernostUdaju
n7:S
n4:entitaPredkladatele
n13:predkladatel
n4:idSjednocenehoVysledku
253741
n4:idVysledku
RIV/68081731:_____/10:00350874
n4:jazykVysledku
n16:eng
n4:klicovaSlova
electron temperature; electron density; optical emission spectroscopy; collisional–radiative model
n4:klicoveSlovo
n8:electron%20density n8:electron%20temperature n8:optical%20emission%20spectroscopy n8:collisional%E2%80%93radiative%20model
n4:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n4:kontrolniKodProRIV
[CE575229EB7B]
n4:nazevZdroje
Journal of Physics D-Applied Physics
n4:obor
n15:BL
n4:pocetDomacichTvurcuVysledku
1
n4:pocetTvurcuVysledku
4
n4:projekt
n6:GA202%2F09%2F0800 n6:KAN101630651 n6:GA202%2F07%2F1669
n4:rokUplatneniVysledku
n14:2010
n4:svazekPeriodika
43
n4:tvurceVysledku
Trunec, D. Dvořák, P. Navrátil, Z. Brzobohatý, Oto
n4:wos
000284942800007
n4:zamer
n18:MSM0021622411 n18:AV0Z20650511
s:issn
0022-3727
s:numberOfPages
11