This HTML5 document contains 45 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n17http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n6http://purl.org/net/nknouf/ns/bibtex#
n5http://linked.opendata.cz/resource/domain/vavai/projekt/
n4http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n21http://linked.opendata.cz/ontology/domain/vavai/
n20https://schema.org/
n10http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n18http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68081731%3A_____%2F10%3A00350672%21RIV11-AV0-68081731/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n9http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n14http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n19http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n8http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n12http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F10%3A00350672%21RIV11-AV0-68081731
rdf:type
skos:Concept n21:Vysledek
dcterms:description
Structure of thin films usually requires to be examined on microscopic level. The research topics like growth and stability of thin films, phase transitions and separation, crystallization, diffusion and defect formation has a need for LEED or XPS as techniques adequate for investigation of atomic transport processes on short length scales. The low energy electron microscopy is a complementary solution for imaging of samples with special concern for knowledge of surface physics and material science. In this contribution the microscopic examination of as-deposited and thermal treated thin films on Si substrates is performed. Structure of thin films usually requires to be examined on microscopic level. The research topics like growth and stability of thin films, phase transitions and separation, crystallization, diffusion and defect formation has a need for LEED or XPS as techniques adequate for investigation of atomic transport processes on short length scales. The low energy electron microscopy is a complementary solution for imaging of samples with special concern for knowledge of surface physics and material science. In this contribution the microscopic examination of as-deposited and thermal treated thin films on Si substrates is performed.
dcterms:title
Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope
skos:prefLabel
Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope
skos:notation
RIV/68081731:_____/10:00350672!RIV11-AV0-68081731
n3:aktivita
n14:Z n14:P
n3:aktivity
P(IAA100650803), Z(AV0Z20650511)
n3:dodaniDat
n12:2011
n3:domaciTvurceVysledku
n4:9000984 n4:6440959 n4:2233487
n3:druhVysledku
n8:D
n3:duvernostUdaju
n16:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
262886
n3:idVysledku
RIV/68081731:_____/10:00350672
n3:jazykVysledku
n7:eng
n3:klicovaSlova
thin films; SLEEM; Si substrate
n3:klicoveSlovo
n9:SLEEM n9:thin%20films n9:Si%20substrate
n3:kontrolniKodProRIV
[93728E13E12C]
n3:mistoKonaniAkce
Skalský dvůr
n3:mistoVydani
Brno
n3:nazevZdroje
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
n3:obor
n19:JA
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
4
n3:projekt
n5:IAA100650803
n3:rokUplatneniVysledku
n12:2010
n3:tvurceVysledku
Zobačová, Jitka Polčák, J. Frank, Luděk Mikmeková, Šárka
n3:typAkce
n17:WRD
n3:zahajeniAkce
2010-05-31+02:00
n3:zamer
n10:AV0Z20650511
s:numberOfPages
2
n6:hasPublisher
Institute of Scientific Instruments AS CR, v.v.i
n20:isbn
978-80-254-6842-5