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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F03%3A12030034%21RIV%2F2004%2FAV0%2FA12004%2FN
rdf:type
n11:Vysledek skos:Concept
dcterms:description
The resolution of 1 nm at primary beam energy 15 keV and 1.5 nm at 1kV is being guaranteed for an up-to-date commercially available scanning electro n microscope with a cold field emission (CFE) gun. Quite recently, SEM imaging down to 100 eV was demonstrated with resolution on the test specimen (Au/C) that can be estimated to 10 nm [1]. It is well known that the cathode lens (CL) objective lens has to be used in order to improve the resolution to several nm for energies in tens or even units of eV [2 to 5]. At low and very low energies the problem of resolution has to be addressed specifically. The standard quadratic formula (SQF) has proved to provide a maximum estimate to the probe size [6]. This summation rule results from convolution of Gaussian confusion discs in which the ray radii are considered as mutually independent random variables with normal distributions. More realistic but still reasonable simple relation is obtained when defining the disc sizes via diameter encircling some current f The resolution of 1 nm at primary beam energy 15 keV and 1.5 nm at 1kV is being guaranteed for an up-to-date commercially available scanning electro n microscope with a cold field emission (CFE) gun. Quite recently, SEM imaging down to 100 eV was demonstrated with resolution on the test specimen (Au/C) that can be estimated to 10 nm [1]. It is well known that the cathode lens (CL) objective lens has to be used in order to improve the resolution to several nm for energies in tens or even units of eV [2 to 5]. At low and very low energies the problem of resolution has to be addressed specifically. The standard quadratic formula (SQF) has proved to provide a maximum estimate to the probe size [6]. This summation rule results from convolution of Gaussian confusion discs in which the ray radii are considered as mutually independent random variables with normal distributions. More realistic but still reasonable simple relation is obtained when defining the disc sizes via diameter encircling some current f
dcterms:title
Current trends in scanning low energy electron microscopy (SLEEM). Current trends in scanning low energy electron microscopy (SLEEM).
skos:prefLabel
Current trends in scanning low energy electron microscopy (SLEEM). Current trends in scanning low energy electron microscopy (SLEEM).
skos:notation
RIV/68081731:_____/03:12030034!RIV/2004/AV0/A12004/N
n3:strany
85 ; 86
n3:aktivita
n16:Z n16:P
n3:aktivity
P(IAA1065304), Z(AV0Z2065902)
n3:dodaniDat
n6:2004
n3:domaciTvurceVysledku
n13:7708017 n13:9000984
n3:druhVysledku
n19:D
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
602508
n3:idVysledku
RIV/68081731:_____/03:12030034
n3:jazykVysledku
n8:eng
n3:klicovaSlova
scanning electron microscopy; primary beam energy; field emission gun
n3:klicoveSlovo
n5:scanning%20electron%20microscopy n5:field%20emission%20gun n5:primary%20beam%20energy
n3:kontrolniKodProRIV
[047A965E634D]
n3:mistoKonaniAkce
Pula [HR]
n3:mistoVydani
Zagreb
n3:nazevZdroje
Proceedings of the 6th Multinational Congress on Microscopy - European Extension.
n3:obor
n17:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:projekt
n10:IAA1065304
n3:rokUplatneniVysledku
n6:2003
n3:tvurceVysledku
Frank, Luděk Müllerová, Ilona
n3:typAkce
n15:EUR
n3:zahajeniAkce
2003-06-01+02:00
n3:zamer
n4:AV0Z2065902
s:numberOfPages
2
n20:hasPublisher
Croatian Society for Electron Microscopy