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Statements

Subject Item
n2:RIV%2F68081731%3A_____%2F01%3A12010035%21RIV%2F2003%2FAV0%2FA12003%2FN
rdf:type
n11:Vysledek skos:Concept
dcterms:description
The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached. The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.
dcterms:title
Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control. Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.
skos:prefLabel
Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control. Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.
skos:notation
RIV/68081731:_____/01:12010035!RIV/2003/AV0/A12003/N
n3:strany
333;338
n3:aktivita
n12:Z
n3:aktivity
Z(AV0Z2065902)
n3:dodaniDat
n14:2003
n3:domaciTvurceVysledku
n13:9923802 n13:5467853
n3:druhVysledku
n20:D
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
699333
n3:idVysledku
RIV/68081731:_____/01:12010035
n3:jazykVysledku
n6:eng
n3:klicovaSlova
micropositioning; PID controller; interferometry measurements
n3:klicoveSlovo
n9:PID%20controller n9:interferometry%20measurements n9:micropositioning
n3:kontrolniKodProRIV
[2A365D33B548]
n3:mistoKonaniAkce
Velké Losiny [CZ]
n3:mistoVydani
Washington
n3:nazevZdroje
Proceedings of the 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proc. SPIE 4356).
n3:obor
n16:BH
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
3
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:rokUplatneniVysledku
n14:2001
n3:tvurceVysledku
Číp, Ondřej Mikel, Břetislav Harna, Z.
n3:typAkce
n4:WRD
n3:zahajeniAkce
2000-09-12+02:00
n3:zamer
n10:AV0Z2065902
s:numberOfPages
6
n18:hasPublisher
SPIE-The International Society for Optical Engineering
n19:isbn
0-8194-4047-7