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Statements

Subject Item
n2:RIV%2F68081723%3A_____%2F12%3A00387901%21RIV13-AV0-68081723
rdf:type
n7:Vysledek skos:Concept
dcterms:description
This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling. This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
dcterms:title
Determination of mechanical properties from microcompression test Determination of mechanical properties from microcompression test
skos:prefLabel
Determination of mechanical properties from microcompression test Determination of mechanical properties from microcompression test
skos:notation
RIV/68081723:_____/12:00387901!RIV13-AV0-68081723
n7:predkladatel
n19:ico%3A68081723
n3:aktivita
n4:S n4:I
n3:aktivity
I, S
n3:dodaniDat
n12:2013
n3:domaciTvurceVysledku
n5:3317307 n5:2240750 n5:5413206 n5:6371779 n5:3875636
n3:druhVysledku
n16:D
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n10:predkladatel
n3:idSjednocenehoVysledku
130610
n3:idVysledku
RIV/68081723:_____/12:00387901
n3:jazykVysledku
n18:eng
n3:klicovaSlova
microcompression; thin film properties; focused ion beam; Young modulus; FEM
n3:klicoveSlovo
n8:focused%20ion%20beam n8:microcompression n8:Young%20modulus n8:FEM n8:thin%20film%20properties
n3:kontrolniKodProRIV
[918AFED4D1A2]
n3:mistoKonaniAkce
Svratka
n3:mistoVydani
Prague
n3:nazevZdroje
Engineering Mechanics 2012
n3:obor
n15:JL
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:rokUplatneniVysledku
n12:2012
n3:tvurceVysledku
Petráčková, Klára Náhlík, Luboš Kruml, Tomáš Kuběna, Ivo Truhlář, Michal
n3:typAkce
n6:EUR
n3:zahajeniAkce
2012-05-14+02:00
s:numberOfPages
6
n14:hasPublisher
ITAM AS CR, v. v. i.
n20:isbn
978-80-86246-40-6