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Statements

Subject Item
n2:RIV%2F68081723%3A_____%2F12%3A00387893%21RIV13-AV0-68081723
rdf:type
n3:Vysledek skos:Concept
dcterms:description
The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties. The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
dcterms:title
Estimation of mechanical properties of thin Al surface layer Estimation of mechanical properties of thin Al surface layer
skos:prefLabel
Estimation of mechanical properties of thin Al surface layer Estimation of mechanical properties of thin Al surface layer
skos:notation
RIV/68081723:_____/12:00387893!RIV13-AV0-68081723
n3:predkladatel
n6:ico%3A68081723
n4:aktivita
n7:Z n7:S n7:I
n4:aktivity
I, S, Z(AV0Z20410507)
n4:dodaniDat
n9:2013
n4:domaciTvurceVysledku
n15:5413206 n15:2240750 n15:3317307 n15:3875636 n15:6371779
n4:druhVysledku
n18:D
n4:duvernostUdaju
n10:S
n4:entitaPredkladatele
n21:predkladatel
n4:idSjednocenehoVysledku
134787
n4:idVysledku
RIV/68081723:_____/12:00387893
n4:jazykVysledku
n17:eng
n4:klicovaSlova
microcompression; thin film properties; focused ion beam; FEM modelling
n4:klicoveSlovo
n5:microcompression n5:focused%20ion%20beam n5:FEM%20modelling n5:thin%20film%20properties
n4:kontrolniKodProRIV
[49B6FD90C7B2]
n4:mistoKonaniAkce
Plzeň
n4:mistoVydani
Plzeň
n4:nazevZdroje
14th International conference Applied Mechanics 2012 - Conference proceedings
n4:obor
n20:JL
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
5
n4:rokUplatneniVysledku
n9:2012
n4:tvurceVysledku
Kuběna, Ivo Petráčková, Klára Truhlář, Michal Kruml, Tomáš Náhlík, Luboš
n4:typAkce
n16:EUR
n4:zahajeniAkce
2012-04-16+02:00
n4:zamer
n19:AV0Z20410507
s:numberOfPages
4
n14:hasPublisher
Západočeská univerzita v Plzni
n12:isbn
978-80-261-0097-3