This HTML5 document contains 42 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n19http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n16http://purl.org/net/nknouf/ns/bibtex#
n6http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n14http://linked.opendata.cz/resource/domain/vavai/subjekt/
n12http://linked.opendata.cz/ontology/domain/vavai/
n20https://schema.org/
n9http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n8http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F68081723%3A_____%2F11%3A00369042%21RIV12-AV0-68081723/
n5http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n15http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n17http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n13http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n18http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n4http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n7http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F68081723%3A_____%2F11%3A00369042%21RIV12-AV0-68081723
rdf:type
skos:Concept n12:Vysledek
dcterms:description
Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely. Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely.
dcterms:title
Mechanical properties of Al thin films measured by microcompression Mechanical properties of Al thin films measured by microcompression
skos:prefLabel
Mechanical properties of Al thin films measured by microcompression Mechanical properties of Al thin films measured by microcompression
skos:notation
RIV/68081723:_____/11:00369042!RIV12-AV0-68081723
n12:predkladatel
n14:ico%3A68081723
n3:aktivita
n13:Z
n3:aktivity
Z(AV0Z20410507)
n3:dodaniDat
n7:2012
n3:domaciTvurceVysledku
n6:2240750 n6:5413206
n3:druhVysledku
n4:D
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n8:predkladatel
n3:idSjednocenehoVysledku
211234
n3:idVysledku
RIV/68081723:_____/11:00369042
n3:jazykVysledku
n17:eng
n3:klicovaSlova
focused ion beam; pillars; Al thin film; nanoindenter
n3:klicoveSlovo
n5:pillars n5:Al%20thin%20film n5:nanoindenter n5:focused%20ion%20beam
n3:kontrolniKodProRIV
[E9F3C7083FE9]
n3:mistoKonaniAkce
Velké Bílovice
n3:mistoVydani
Brno, Česká republika
n3:nazevZdroje
Applied Mechanics 2011
n3:obor
n18:JJ
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:rokUplatneniVysledku
n7:2011
n3:tvurceVysledku
Kruml, Tomáš Kuběna, Ivo
n3:typAkce
n19:EUR
n3:zahajeniAkce
2011-04-18+02:00
n3:zamer
n9:AV0Z20410507
s:numberOfPages
4
n16:hasPublisher
Ústav fyziky materiálů AV ČR
n20:isbn
978-80-87434-03-1