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Statements

Subject Item
n2:RIV%2F61989592%3A15310%2F09%3A00010957%21RIV10-AV0-15310___
rdf:type
skos:Concept n19:Vysledek
dcterms:description
A new method for measuring plastic properties of thin films deposited on a substrate is presented. Micrometric cylindrical specimens with the axis perpendicular to the film surface were prepared by milling out the surrounding material using the focused ion beam technique. Such specimens were deformed by means of a nanoindenter outfitted with a flat diamond tip. An equivalent to the macroscopic compressive curve was obtained.Elastic modulus and hardness of the film were then measured using a Berkovich tip.The precise knowledge of the gage length and the independent measurement of elastic properties enable the accurate determination of the stress#strain curve. As compared with the results published in the literature on the specimens with the same dimensions, the studied material deforms less heterogeneously, probably as a consequence of the symmetric crystallographic orientation of the specimens. A new method for measuring plastic properties of thin films deposited on a substrate is presented. Micrometric cylindrical specimens with the axis perpendicular to the film surface were prepared by milling out the surrounding material using the focused ion beam technique. Such specimens were deformed by means of a nanoindenter outfitted with a flat diamond tip. An equivalent to the macroscopic compressive curve was obtained.Elastic modulus and hardness of the film were then measured using a Berkovich tip.The precise knowledge of the gage length and the independent measurement of elastic properties enable the accurate determination of the stress#strain curve. As compared with the results published in the literature on the specimens with the same dimensions, the studied material deforms less heterogeneously, probably as a consequence of the symmetric crystallographic orientation of the specimens.
dcterms:title
A new method for mechanical testing of thin films: Applicationto aluminum A new method for mechanical testing of thin films: Applicationto aluminum
skos:prefLabel
A new method for mechanical testing of thin films: Applicationto aluminum A new method for mechanical testing of thin films: Applicationto aluminum
skos:notation
RIV/61989592:15310/09:00010957!RIV10-AV0-15310___
n3:aktivita
n5:P n5:Z
n3:aktivity
P(KAN301370701), Z(AV0Z10100522), Z(AV0Z20410507)
n3:cisloPeriodika
4
n3:dodaniDat
n14:2010
n3:domaciTvurceVysledku
n13:9361820 n13:3966208
n3:druhVysledku
n11:J
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n6:predkladatel
n3:idSjednocenehoVysledku
301399
n3:idVysledku
RIV/61989592:15310/09:00010957
n3:jazykVysledku
n17:eng
n3:klicovaSlova
Al; film; stress/strain relationship; scanning electron microscopy; hardness
n3:klicoveSlovo
n10:film n10:stress%2Fstrain%20relationship n10:scanning%20electron%20microscopy n10:hardness n10:Al
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[70D3EE599F75]
n3:nazevZdroje
Journal of Materials Research
n3:obor
n16:BH
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
5
n3:projekt
n7:KAN301370701
n3:rokUplatneniVysledku
n14:2009
n3:svazekPeriodika
24
n3:tvurceVysledku
Stranyánek, Martin Kruml, T. Pánek, P. Čtvrtlík, Radim Boháč, P.
n3:zamer
n18:AV0Z10100522 n18:AV0Z20410507
s:issn
0884-2914
s:numberOfPages
8
n4:organizacniJednotka
15310