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Statements

Subject Item
n2:RIV%2F61989100%3A27600%2F06%3A00013523%21RIV07-GA0-27600___
rdf:type
n15:Vysledek skos:Concept
dcterms:description
The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating. Je studován teoretický model vazby evanescentní vlny na dielektrické a metalické páskové mřížce. Interakce elektromagnetické vlny s periodickou strukturou je modelována metodou vázaných vln implementovanou jako Fourierova modální metoda. Jsou prezentovány simulace elipsometrické odezvy při různých geometrických a materiálových konfiguracích. The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.
dcterms:title
Elipsometrie při úplném vnitřním odrazu od periodické struktury Total internal reflection ellipsometry of periodic structures Total internal reflection ellipsometry of periodic structures
skos:prefLabel
Total internal reflection ellipsometry of periodic structures Total internal reflection ellipsometry of periodic structures Elipsometrie při úplném vnitřním odrazu od periodické struktury
skos:notation
RIV/61989100:27600/06:00013523!RIV07-GA0-27600___
n3:strany
1-5
n3:aktivita
n8:S n8:P
n3:aktivity
P(1P05ME768), P(GA202/03/0776), S
n3:cisloPeriodika
6180
n3:dodaniDat
n9:2007
n3:domaciTvurceVysledku
n5:9219269 n5:1171283 n5:9078614 n5:5882087
n3:druhVysledku
n10:J
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
504022
n3:idVysledku
RIV/61989100:27600/06:00013523
n3:jazykVysledku
n6:eng
n3:klicovaSlova
TIRE; lamellar periodic structure
n3:klicoveSlovo
n16:TIRE n16:lamellar%20periodic%20structure
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[213D450BDC7B]
n3:nazevZdroje
Proceedings of SPIE
n3:obor
n17:BH
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
5
n3:projekt
n4:1P05ME768 n4:GA202%2F03%2F0776
n3:rokUplatneniVysledku
n9:2006
n3:svazekPeriodika
2006
n3:tvurceVysledku
Vlček, Jaroslav Životský, Ondřej Foldyna, Martin Pištora, Jaromír Hlubina, Petr
s:issn
0277-786X
s:numberOfPages
6
n12:organizacniJednotka
27600