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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n18http://localhost/temp/predkladatel/
n11http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n16http://linked.opendata.cz/ontology/domain/vavai/
n12http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n8http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F61989100%3A27350%2F09%3A00021679%21RIV10-MSM-27350___/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n4http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n13http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n5http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n15http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n6http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F61989100%3A27350%2F09%3A00021679%21RIV10-MSM-27350___
rdf:type
skos:Concept n16:Vysledek
dcterms:description
A method to determine the thickness of a nonabsorbing thin film on an absorbing substrate is presented. A linear relation between the thin-film thickness and the tangent wavelength of the reflectance spectrum for a specific interference order is revealed, which permits the calculation of the thickness provided that the wavelength-dependent optical parameters of the thin film and the substrate are known. The thickness can be calculated precisely from the reflectance spectrum by using one extreme only, as is demonstrated theoretically for SiO2 thin film on a Si substrate. The application of this method is demonstrated experimentally for the same thin-film structure but with different Si substrates. The results are compared with those given by the algebraic fitting method, and very good agreement is confirmed. A method to determine the thickness of a nonabsorbing thin film on an absorbing substrate is presented. A linear relation between the thin-film thickness and the tangent wavelength of the reflectance spectrum for a specific interference order is revealed, which permits the calculation of the thickness provided that the wavelength-dependent optical parameters of the thin film and the substrate are known. The thickness can be calculated precisely from the reflectance spectrum by using one extreme only, as is demonstrated theoretically for SiO2 thin film on a Si substrate. The application of this method is demonstrated experimentally for the same thin-film structure but with different Si substrates. The results are compared with those given by the algebraic fitting method, and very good agreement is confirmed.
dcterms:title
Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement
skos:prefLabel
Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement
skos:notation
RIV/61989100:27350/09:00021679!RIV10-MSM-27350___
n3:aktivita
n13:Z
n3:aktivity
Z(MSM6198910016)
n3:cisloPeriodika
5
n3:dodaniDat
n6:2010
n3:domaciTvurceVysledku
n11:7662114 n11:1171283 n11:5271444
n3:druhVysledku
n15:J
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n8:predkladatel
n3:idSjednocenehoVysledku
341212
n3:idVysledku
RIV/61989100:27350/09:00021679
n3:jazykVysledku
n5:eng
n3:klicovaSlova
Thin film thickness; reflectance spectrum; envelopes; tangent wavelengths
n3:klicoveSlovo
n4:envelopes n4:tangent%20wavelengths n4:reflectance%20spectrum n4:Thin%20film%20thickness
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[AB121A28AA80]
n3:nazevZdroje
Applied Optics
n3:obor
n17:BH
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:rokUplatneniVysledku
n6:2009
n3:svazekPeriodika
48
n3:tvurceVysledku
Luňáčková, Milena Luňáček, Jiří Hlubina, Petr
n3:wos
000264210900026
n3:zamer
n12:MSM6198910016
s:issn
0003-6935
s:numberOfPages
5
n18:organizacniJednotka
27350