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Statements

Subject Item
n2:RIV%2F61989100%3A27350%2F08%3A00019795%21RIV10-MSM-27350___
rdf:type
skos:Concept n19:Vysledek
dcterms:description
A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection. A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.
dcterms:title
Precise phase-modulation generalized ellipsometry of anisotropic samples Precise phase-modulation generalized ellipsometry of anisotropic samples
skos:prefLabel
Precise phase-modulation generalized ellipsometry of anisotropic samples Precise phase-modulation generalized ellipsometry of anisotropic samples
skos:notation
RIV/61989100:27350/08:00019795!RIV10-MSM-27350___
n3:aktivita
n6:Z n6:P
n3:aktivity
P(GA202/06/0531), P(KAN400100653), Z(MSM6198910016)
n3:cisloPeriodika
4
n3:dodaniDat
n9:2010
n3:domaciTvurceVysledku
n11:1468391 n11:5882087
n3:druhVysledku
n18:J
n3:duvernostUdaju
n7:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
388699
n3:idVysledku
RIV/61989100:27350/08:00019795
n3:jazykVysledku
n17:eng
n3:klicovaSlova
generalized ellipsometry; anisotropic samples
n3:klicoveSlovo
n8:anisotropic%20samples n8:generalized%20ellipsometry
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[569B3A8FD0ED]
n3:nazevZdroje
Phys.Status Solidi A
n3:obor
n14:BH
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
4
n3:projekt
n4:KAN400100653 n4:GA202%2F06%2F0531
n3:rokUplatneniVysledku
n9:2008
n3:svazekPeriodika
205
n3:tvurceVysledku
Foldyna, M. Pištora, Jaromír Postava, Kamil Halagačka, L.
n3:zamer
n16:MSM6198910016
s:issn
1862-6300
s:numberOfPages
4
n15:organizacniJednotka
27350