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Statements

Subject Item
n2:RIV%2F61989100%3A27350%2F06%3A00016826%21RIV08-GA0-27350___
rdf:type
n8:Vysledek skos:Concept
dcterms:description
Spectroscopic ellipsometry SE in the visible/near-UV spectral range is applied to monitor optical critical dimensions of quartz, Si, and Ta gratings, namely, the depth, linewidth, and period. To analyze the SE measurements, the rigorous coupled-wave theory is applied, whose implementation is described in detail, referred to as the Airy-like internal reflection series with the Fourier factorization rules taken into account. It is demonstrated that the Airy-like series implementation of the coupled-wave theory with the factorization rules provides fast convergence of both the simulated SE parameters and the extracted dimensions. The convergence properties are analyzed with respect to the maximum Fourier harmonics retained inside the periodic media and also with respect to the fineness of slicing imperfect Ta wires with paraboloidally curved edges. Spectroscopic ellipsometry SE in the visible/near-UV spectral range is applied to monitor optical critical dimensions of quartz, Si, and Ta gratings, namely, the depth, linewidth, and period. To analyze the SE measurements, the rigorous coupled-wave theory is applied, whose implementation is described in detail, referred to as the Airy-like internal reflection series with the Fourier factorization rules taken into account. It is demonstrated that the Airy-like series implementation of the coupled-wave theory with the factorization rules provides fast convergence of both the simulated SE parameters and the extracted dimensions. The convergence properties are analyzed with respect to the maximum Fourier harmonics retained inside the periodic media and also with respect to the fineness of slicing imperfect Ta wires with paraboloidally curved edges. Konvergenční vlastnosti měření kritické dimenze
dcterms:title
Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Konvergenční vlastnosti měření kritické dimenze
skos:prefLabel
Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials Konvergenční vlastnosti měření kritické dimenze
skos:notation
RIV/61989100:27350/06:00016826!RIV08-GA0-27350___
n3:strany
054906-054906
n3:aktivita
n12:Z n12:S n12:P
n3:aktivity
P(GA202/06/0531), S, Z(MSM0021620834), Z(MSM6198910016)
n3:cisloPeriodika
5
n3:dodaniDat
n9:2008
n3:domaciTvurceVysledku
n16:5882087
n3:druhVysledku
n17:J
n3:duvernostUdaju
n10:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
469806
n3:idVysledku
RIV/61989100:27350/06:00016826
n3:jazykVysledku
n19:eng
n3:klicovaSlova
critical dimension; Spectroscopic ellipsometry; gratings
n3:klicoveSlovo
n7:gratings n7:critical%20dimension n7:Spectroscopic%20ellipsometry
n3:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n3:kontrolniKodProRIV
[EDA16EC4640B]
n3:nazevZdroje
Journal of Applied Physics
n3:obor
n14:BH
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
8
n3:projekt
n4:GA202%2F06%2F0531
n3:rokUplatneniVysledku
n9:2006
n3:svazekPeriodika
100
n3:tvurceVysledku
Pištora, Jaromír Yamaguchi, T. Horie, M. Yamaguchi, S. Mistrik, J. Antoš, R. Visnovsky, S. Otami, Y.
n3:zamer
n6:MSM6198910016 n6:MSM0021620834
s:issn
0021-8979
s:numberOfPages
11
n18:organizacniJednotka
27350