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Namespace Prefixes

PrefixIRI
n18http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n11http://purl.org/net/nknouf/ns/bibtex#
n17http://linked.opendata.cz/resource/domain/vavai/projekt/
n9http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n20http://linked.opendata.cz/resource/domain/vavai/subjekt/
n8http://linked.opendata.cz/ontology/domain/vavai/
n19https://schema.org/
n12http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F61389021%3A_____%2F13%3A00395869%21RIV14-MSM-61389021/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n5http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n21http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n13http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n6http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n10http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n15http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F61389021%3A_____%2F13%3A00395869%21RIV14-MSM-61389021
rdf:type
n8:Vysledek skos:Concept
dcterms:description
We report results of experiments connected with surface modification of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials. We report results of experiments connected with surface modification of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials.
dcterms:title
Application of EUV optics to surface modification of materials Application of EUV optics to surface modification of materials
skos:prefLabel
Application of EUV optics to surface modification of materials Application of EUV optics to surface modification of materials
skos:notation
RIV/61389021:_____/13:00395869!RIV14-MSM-61389021
n8:predkladatel
n20:ico%3A61389021
n3:aktivita
n6:P n6:I
n3:aktivity
I, P(LG13029)
n3:dodaniDat
n15:2014
n3:domaciTvurceVysledku
n9:2068915 n9:8846669 n9:9134255 Frolov, Oleksandr n9:2844397
n3:druhVysledku
n14:D
n3:duvernostUdaju
n21:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
61721
n3:idVysledku
RIV/61389021:_____/13:00395869
n3:jazykVysledku
n13:eng
n3:klicovaSlova
EUV; laser; radiation; source; capillary discharge; plasma; ablation; surface modification
n3:klicoveSlovo
n5:plasma n5:EUV n5:ablation n5:source n5:surface%20modification n5:radiation n5:capillary%20discharge n5:laser
n3:kontrolniKodProRIV
[B3CA1FCE84BC]
n3:mistoKonaniAkce
Prague
n3:mistoVydani
Bellingham, Washington
n3:nazevZdroje
Proceedings of SPIE 8777
n3:obor
n10:BL
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
6
n3:projekt
n17:LG13029
n3:rokUplatneniVysledku
n15:2013
n3:tvurceVysledku
Choukourov, A. Koláček, Karel Frolov, Oleksandr Prukner, Václav Schmidt, Jiří Štraus, Jaroslav
n3:typAkce
n18:WRD
n3:wos
000329577700005
n3:zahajeniAkce
2013-04-15+02:00
s:issn
0277-786X
s:numberOfPages
7
n11:hasPublisher
SPIE Press
n19:isbn
978-0-8194-9579-2