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Statements

Subject Item
n2:RIV%2F61389021%3A_____%2F12%3A00386547%21RIV13-AV0-61389021
rdf:type
skos:Concept n3:Vysledek
dcterms:description
Předneseno na konf.:Plasma Science(ICOPS), 2012 Abstracts IEEE International Conference on,Edinburgh,GB,08.07.2012-13.07.2012, We report results of experiments connected with surface modification of organic and inorganic materials with an intense EUV laser beam. The samples were irradiated by laser beam from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a high-current capillary discharge driver. A detailed description of our driver CAPEX can be found in the early published paper [1]. The laser beam is focused with a spherical (R=2100 mm) Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. For analysis of laser beam footprints an atomic-force microscope (AFM) was used. It turned out that the energy of focused EUV laser beam is sufficient for ablation not only easily ablative material PMMA but also thin layer of gold (thickness 40 nm) and GaAs by single shot, even if the focus is significantly Předneseno na konf.:Plasma Science(ICOPS), 2012 Abstracts IEEE International Conference on,Edinburgh,GB,08.07.2012-13.07.2012, We report results of experiments connected with surface modification of organic and inorganic materials with an intense EUV laser beam. The samples were irradiated by laser beam from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a high-current capillary discharge driver. A detailed description of our driver CAPEX can be found in the early published paper [1]. The laser beam is focused with a spherical (R=2100 mm) Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. For analysis of laser beam footprints an atomic-force microscope (AFM) was used. It turned out that the energy of focused EUV laser beam is sufficient for ablation not only easily ablative material PMMA but also thin layer of gold (thickness 40 nm) and GaAs by single shot, even if the focus is significantly
dcterms:title
Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166) Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166)
skos:prefLabel
Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166) Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166)
skos:notation
RIV/61389021:_____/12:00386547!RIV13-AV0-61389021
n3:predkladatel
n4:ico%3A61389021
n5:aktivita
n15:P n15:Z
n5:aktivity
P(LA08024), Z(AV0Z20430508)
n5:dodaniDat
n9:2013
n5:domaciTvurceVysledku
n12:2068915 n12:9134255 n12:2844397 Frolov, Oleksandr n12:8846669
n5:druhVysledku
n16:O
n5:duvernostUdaju
n18:S
n5:entitaPredkladatele
n13:predkladatel
n5:idSjednocenehoVysledku
154444
n5:idVysledku
RIV/61389021:_____/12:00386547
n5:jazykVysledku
n10:eng
n5:klicovaSlova
Capillary discharge; EUV; laser; focusing; surface; modification; plasma; ablation
n5:klicoveSlovo
n6:focusing n6:Capillary%20discharge n6:plasma n6:modification n6:laser n6:surface n6:EUV n6:ablation
n5:kontrolniKodProRIV
[42E3E72A5993]
n5:obor
n17:BL
n5:pocetDomacichTvurcuVysledku
5
n5:pocetTvurcuVysledku
6
n5:projekt
n14:LA08024
n5:rokUplatneniVysledku
n9:2012
n5:tvurceVysledku
Štraus, Jaroslav Frolov, Oleksandr Koláček, Karel Schmidt, Jiří Prukner, Václav Choukourov, A.
n5:zamer
n8:AV0Z20430508