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Statements

Subject Item
n2:RIV%2F61389021%3A_____%2F11%3A00371236%21RIV12-AV0-61389021
rdf:type
n13:Vysledek skos:Concept
dcterms:description
Many applications require surface modification and micro-structuring of polymers. For these purposes is mainly used ultraviolet (UV) radiation from excimer lamps or excimer lasers. However, these sources have a decided disadvantage - degrading the polymer deep inside due to relatively big radiation penetration depth which may exceed 100 μm. In contrast, extreme ultraviolet (EUV) radiation is absorbed in a layer approximately 100 nm thick only. In this work, the radiation from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a capillary discharge driver is focused with a spherical Si/Sc multilayer mirror for surface modification of PMMA sample or thin gold layer (thickness about 40 nm). It was found that the focused EUV laser beam is capable by one shot to ablate PMMA or layer of gold, even if the focus is significantly influenced by astigmatism. Many applications require surface modification and micro-structuring of polymers. For these purposes is mainly used ultraviolet (UV) radiation from excimer lamps or excimer lasers. However, these sources have a decided disadvantage - degrading the polymer deep inside due to relatively big radiation penetration depth which may exceed 100 μm. In contrast, extreme ultraviolet (EUV) radiation is absorbed in a layer approximately 100 nm thick only. In this work, the radiation from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a capillary discharge driver is focused with a spherical Si/Sc multilayer mirror for surface modification of PMMA sample or thin gold layer (thickness about 40 nm). It was found that the focused EUV laser beam is capable by one shot to ablate PMMA or layer of gold, even if the focus is significantly influenced by astigmatism.
dcterms:title
Surface modification by EUV laser beam based on capillary discharge Surface modification by EUV laser beam based on capillary discharge
skos:prefLabel
Surface modification by EUV laser beam based on capillary discharge Surface modification by EUV laser beam based on capillary discharge
skos:notation
RIV/61389021:_____/11:00371236!RIV12-AV0-61389021
n13:predkladatel
n14:ico%3A61389021
n4:aktivita
n12:Z n12:P
n4:aktivity
P(KAN300100702), P(LA08024), P(LC528), Z(AV0Z20430508)
n4:cisloPeriodika
58
n4:dodaniDat
n16:2012
n4:domaciTvurceVysledku
n9:8846669 n9:9134255 Frolov, Oleksandr n9:2844397 n9:2068915
n4:druhVysledku
n15:J
n4:duvernostUdaju
n10:S
n4:entitaPredkladatele
n11:predkladatel
n4:idSjednocenehoVysledku
233492
n4:idVysledku
RIV/61389021:_____/11:00371236
n4:jazykVysledku
n18:eng
n4:klicovaSlova
soft x-ray; EUV; laser; radiation; source; capillary; discharge; plasma; ablation; surface modification
n4:klicoveSlovo
n6:source n6:capillary n6:plasma n6:discharge n6:laser n6:surface%20modification n6:ablation n6:soft%20x-ray n6:EUV n6:radiation
n4:kodStatuVydavatele
AE - Stát Spojené arabské emiráty
n4:kontrolniKodProRIV
[596895910D41]
n4:nazevZdroje
World Academy of Science, Engineering and Technology
n4:obor
n17:BL
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
6
n4:projekt
n7:LA08024 n7:KAN300100702 n7:LC528
n4:rokUplatneniVysledku
n16:2011
n4:svazekPeriodika
-
n4:tvurceVysledku
Schmidt, Jiří Koláček, Karel Frolov, Oleksandr Shukurov, A. Štraus, Jaroslav Prukner, Václav
n4:zamer
n5:AV0Z20430508
s:issn
2010-376X
s:numberOfPages
4